ULVAC DA-121DE真空泵隔膜可面谈

ULVAC DA-121DE真空泵隔膜可面谈

ULVAC DA-121DE真空泵隔膜可面谈

ULVAC DA-121DE真空泵隔膜可面谈

ULVAC DA-121DE真空泵隔膜性能

ULVAC DA-121DE真空泵隔膜引脚线

ULVAC DA-121DE真空泵隔膜更换指南

ULVAC DA-121DE真空泵隔膜维修指南

ULVAC DA-121DE真空泵隔膜相关信息

ULVAC DA-121DE 一、基本性能参数

极限压力：3.3×10³Pa ，这一参数表明了该真空泵在理想状态下能够达到的·低压力值，反映其在高真空获取方面的能力。

抽气速率：在50赫兹时为120升/分钟，60赫兹时为145升/分钟，抽气速率体现了真空泵在单位时间内抽取气体的体积量，不同的频率下有不同的抽气效率。

电源：1φ100V(50/60Hz)，明确了该真空泵适用的电源规格，这是设备正常运行的基本电气条件要求。

质量：26公斤，质量大小会影响设备的搬运、安装以及整体设备布局中的稳定性考虑等方面。

进气管直径：ODφ×IDφ16.0×12.0，合适的进气管直径是保障气体顺利进入真空泵内部进行抽取操作的重要参数，与整体的抽气效率和性能相关。

ULVAC DA-121DE 二、结构特点

隔膜式设计：隔膜真空泵是利用薄橡胶膜（隔膜）的往复运动进行真空排气的真空泵。这种设计使得泵在运行过程中具有·特的优势，例如可以减少气体与泵内部其他部件（如润滑油等）的接触，从而实现无油环境运行，这在对清洁度要求较高的应用场景（如电子器件制造、实验室分析等）非常关键。

干泵类型：属于隔膜型干泵，气体接触区域不使用油的干式真空泵。干式真空泵在很多工艺过程中有重要意义，如在半导体和电子器件制造设备相关的真空排气系统（刻蚀设备、去胶设备、离子清洗设备等）、真空热处理炉真空排气系统（烧结炉、渗碳炉等）、锂电池制造设备真空排气系统（电极干燥设备、脱泡设备、注液设备等）中被广泛应用，因为可以避免油对工艺过程或者产品造成污染。

ULVAC DA-121DE 三、应用领域

电子行业：在半导体和电子器件制造设备相关的真空排气系统，如刻蚀设备、去胶设备、离子清洗设备等有着广泛应用。这是因为其无油的运行环境和较好的真空性能，能够满足电子制造过程中对高洁净度和精·工艺控制的要求。

热处理领域：用于真空热处理炉真空排气系统，像烧结炉、渗碳炉等。在这些设备中，ULVAC DA-121DE真空泵能够有效地抽出炉内的气体，维持炉内的真空环境，保证热处理工艺的顺利进行和产品质量的稳定。

锂电池制造：在锂电池制造设备真空排气系统，例如电极干燥设备、脱泡设备、注液设备等方面发挥作用。由于锂电池制造过程对环境的清洁度、干燥度以及真空度有严格要求，该真空泵的特性能够满足这些需求。

ULVAC DA-121DE vacuum pump diaphragm related information

1. Basic performance parameters

Ultimate pressure: 3.3×10³Pa. This parameter indicates the lowest pressure value that the vacuum pump can reach under ideal conditions, reflecting its ability to obtain high vacuum.

Pumping rate: 120 liters/minute at 50 Hz, 145 liters/minute at 60 Hz. The pumping rate reflects the volume of gas extracted by the vacuum pump per unit time. Different frequencies have different pumping efficiencies.

Power supply: 1φ100V (50/60Hz), which clarifies the power supply specification applicable to the vacuum pump, which is the basic electrical condition requirement for the normal operation of the equipment.

Mass: 26 kg. The mass will affect the handling and installation of the equipment as well as the stability considerations in the overall equipment layout.

Air inlet pipe diameter: ODφ×IDφ16.0×12.0. The appropriate air inlet pipe diameter is an important parameter to ensure that gas can smoothly enter the vacuum pump for extraction operation, and is related to the overall pumping efficiency and performance.

2. Structural characteristics

Diaphragm design: A diaphragm vacuum pump is a vacuum pump that utilizes the reciprocating motion of a thin rubber membrane (diaphragm) for vacuum exhaust. This design gives the pump unique advantages during operation. For example, it can reduce the contact between gas and other components inside the pump (such as lubricating oil, etc.), thereby achieving oil-free operation, which is suitable for applications with high cleanliness requirements. (such as electronic device manufacturing, laboratory analysis, etc.) are very critical.

Dry pump type: It is a diaphragm dry pump, a dry vacuum pump that does not use oil in the gas contact area. Dry vacuum pumps are of great significance in many processes, such as vacuum exhaust systems related to semiconductor and electronic device manufacturing equipment (etching equipment, degumming equipment, ion cleaning equipment, etc.), vacuum heat treatment furnace vacuum exhaust systems (sintering Furnace, carburizing furnace, etc.), lithium battery manufacturing equipment vacuum exhaust system (electrode drying equipment, degassing equipment, liquid injection equipment, etc.) is widely used because it can avoid oil contamination of the process or product.

3. Application fields

Electronics industry: It is widely used in vacuum exhaust systems related to semiconductor and electronic device manufacturing equipment, such as etching equipment, glue removal equipment, ion cleaning equipment, etc. This is because its oil-free operating environment and good vacuum performance can meet the requirements for high cleanliness and precise process control in the electronics manufacturing process.

Heat treatment field: used in vacuum exhaust systems of vacuum heat treatment furnaces, such as sintering furnaces, carburizing furnaces, etc. Among these equipment, ULVAC DA-121DE vacuum pump can effectively extract the gas in the furnace, maintain the vacuum environment in the furnace, and ensure the smooth progress of the heat treatment process and the stability of product quality.

Lithium battery manufacturing: plays a role in the vacuum exhaust system of lithium battery manufacturing equipment, such as electrode drying equipment, degassing equipment, liquid injection equipment, etc. Since the lithium battery manufacturing process has strict requirements on environmental cleanliness, dryness and vacuum, the characteristics of this vacuum pump can meet these requirements.

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