2711-PK12C4D1

2711-PK12C4D1

2711-PK12C4D1

2711-PK12C4D1

2、 数字量信号连接应注意的问题

变频器的输入信号中包括对运行/ 停止、正转/ 反转、点动等运行状态进行操作的数字量输入信号（开关型指令信号），这些信号常来自PLC 的数字量输出信号。PLC 通常利用其内部的继电器接点（继电器输出型P L C ）或具有开关特性的元器件（晶体管输出型PLC）与变频器相连，得到运行状态指令，如图1 和图2 所示。在进行数字量信号的连接时应注意：

（1）使用继电器输出型P L C 与变频器相连时，应注意接触不良常带来变频器误动作，因此在实际接线中要注意连接可靠。

（2）使用晶体管输出型P L C 与变频器相连时，应注意晶体管本身的电压的高低、电流的大小等限制条件在其范围内，保证系统的可靠性。

（3）设计变频器的输入信号电路时，应尽量避免采用继电器等感性负载，因继电器开闭产生的浪涌电流可能引起变频器的误动作。

（4）当P L C 输出的开关信号进入变频器时，有时会发生外部电源和变频器控制电源之间的串扰，应注意对P L C和变频器分开接地，避免两者使用共同的接地线。

SGMG-09ASAL-MY1 

CP9200SHCPU

CIMR-P5U20370F

CIMR-G5M-5037 

MPMAE2S4 

PC-1250-1042

VT130G3U435K

TSX-RAM-25616

TSX-P47-425

LA9-B102

TDS460A

40054P-7019  

WFC4040-0CHT

6014BZ10000E

8055-SCP-453

8020-SCP-724

USART-86-INT

MC47LR121200LCM1

MHL3670035DC2351

8803-P00CO4M

DCD-120-4K

6SE6430-2UD37-5FA0

6SC9811-4BC20

6EW1-890-2AC

6ES5-944-7UB21 

6ES5-581-1EA11 

6ES5-526-3LF11

6AV7-613-0AB10-0BF0

S-6R9009 

S6R-9006

803456-51R 

802220-12RG

6754748-BH-T1

6693885-M6-T1

45C-15C

01KS504852B-EA

USASEM-15YRS11

PK-M909-002 

PC-L984-785

AS-P420-61M

110-CPU-612-04 

HC-H702S-A42

FR-A740-75K

A273-UH-CPU 

BPH1902N5AF2CA1

TDM32020300W0

TDM1-2-050-W1

MDD112B-N-040-N2L-130PA0

MAC90C0G4C110A1W

KDS13100300W1S10

KDS11100300W1220

HDS032W100NHA011

DKC110303FW

CCD011KE1901FW

CIMR-P5U2037

FF-SEDGE6G2-1

502-03814-40R1

M236-H60A-300S 

DS3820MSAB1A1A 

DS3810MMAC 

DS3800NRTB1A 

DS3800HSAA1U1N

7486D52G3 

531X210DMCAMM1

125D4413G3

0621L0429-G001

04019J47G0001

6KDV3224Q2B20

IC646MPP101

SS7B481MDO 

DX8200-2100

SVX030A1-2A1N2

SV9015AC-5M0B00 

1C17653G05

MPM1902FRMM-963 

OETL-NF1600SW

E3N32FAHOA00EXX

SP-502979

SA3100-B010-AE-L6R

MPL-B560F-MK24AA 

8520-ETCP

8500-E1F-K1B

6160-PCN1 

570-DOB-47

5370-CVIMC 

2711-PK12C4D1

2711-K9A2 

2711E-T14C15

2711-B5A20

2098-DSD-HV220-SE

1785L20C15F

1784-T37AC 

1774-RP3

1771-IR

1756-RM

1756-L62 

1755-L1

150-B54NBDB

150-A97NB-NA 

1395B72D2P12P51X 

1395-B72-C2-P10-X1

1395-B65-D1-P50-X1

1392-B075-RH-MC-B-F2  

1336VT-B030-EOR-L3-S1

1336TR003AAGT3EN

1336S-B050-AA-EN4-HA2-L6

1336SB030ANEN5

1336-BDB-SP20D

1326AB-C4C-11 

1326-ABC2F-11

1326ABB740C21MK7

1326ABB430E21K4L

1326ABB2E11A5 

LAM 2600346 PCB-OSC/BUFFER MODULE (F)

LAM 2600446 SUB-ASSY PWR CNTRL MODULE DUAL AMP

LAM 26382 PCB, INTRCNT 01 CHASSIS

LAM 2700234 DETECTOR OPTICAL OXIDEQUAD

LAM 27868 PCB, PC LINK

LAM 28-9975-004 INTL,PC,STPR,BACKPANE,INTEGRA

LAM 2800293 MICROSTEP TRANSLTR MID014-1002

LAM 2800295 PCB-STEPPER INTERFACE ASSY (C)

LAM 2800300 PCB-DISK CONTROL

LAM 2800300 PCB-DISK CONTROL

LAM 2800301 PCB-GRAPHICS CARD

LAM 2800302 PCB-I/O DIGITAL CARD XVM VME

LAM 2800303 PCB-VME A/D CARD XYCOM XVME

LAM 2800304 PCB-VME D/A CARD XYCOM XV (A)

LAM 2800309 PCB OPTICAL SWITCH CASS UP/DN

LAM 2800342 PCB DISK INTERFACE

LAM 2800602 384T SYS INTFC BARE BD

LAM 280473 PCB-STEPPER CPU CARD W/RAM

LAM 286-000751-1 CABLE

LAM 2895048 O-RING W/ ASSY

LAM 290-022890-001 SPACER PC SNAP MOUNT (PACK OF 10)

LAM 2GN120K MOTOR

LAM 30-0007-030 FTG,1/8T x 1/4T , TFE

LAM 30-0028-060 FTG,REDUCER 1/8"TX1/4"PORT

LAM 3000224 LAMP-UVP MERCURY

LAM 3000332 ATHENA-AT16

LAM 3001001 SUB-ASSY DISC DRIVE

LAM 308002 CAPVAR VAC

LAM 31-0004-056 VALVE,DIAPHRAGM,3-WAY MA

LAM 31-0007-009 VALVE, SOLENOID, 24V, 4WAY

LAM 31-0011-002 VALVE,NEEDLE,TEFLON

LAM 31-0013-001 Snolid valve assy

LAM 31-121-025 SWITCH ON/OFF (PACK OF 10)

LAM 32-0006-001 CLAMP, SPLIT HUB.250 ID

LAM 32-0006-004 CLAMP, SPLIT HUB.562 ID

LAM 33-0004-040 SEAL, DYNAMIC .25SHFT PTFE

LAM 33-0004-043 SEAL,ROT,.375IDX.563X3/3

LAM 33-0010-001 BRG.,9MM(W),15MM BORE,32MM

LAM 3401163 VALVE-BONNET NEEDLE 1/4 SW WHITEY

LAM 3409018 FILTER, MICRO

LAM 37-8000-007 BRUSH, PVA

LAM 4000224 BELLOWS 20IN SS

LAM 400255773 VESPEL, HOT EDGE RING, TCP

LAM 42246 PCB, SOL DRV 01 CHASSIS

LAM 42400396 VALVE, PISTON AIR OPERATED

LAM 42738 PCB, SERIAL-PARALLEL 01

LAM 42789 INTRFCE, WFR HNDLR

LAM 43-0003-004 VALVE,N/C,SST DIAPHRAGM

LAM 44-0004-009 RELAY.24V,IOA, 3X3 PDT

LAM 505-017500-353 PKNG,CHAS,MON 14,GF

LAM 515-009821-001 PIN LOCKING

LAM 515-009821-001 PIN LOCKING

LAM 515-010273-001 TOOL, LWR, CHAMBER, COVER

LAM 515-010273-001 TOOL, LWR, CHAMBER, COVER

LAM 515-011835-001 PLATE, 6MM, ELECTRODE, CAL

LAM 515-011835-001 PLATE, 6MM, ELECTRODE, CAL

LAM 515-012168-004 DISC. CAL. ARM. TIGHT POCKET

LAM 515-012168-004 DISC. CAL. ARM. TIGHT POCKET

LAM 515-012168-008 DISC, CLA, ARM TIGHTPKT

LAM 515-012168-008 DISC, CLA, ARM TIGHTPKT

LAM 515-012169-001 TOOL, WAFER CENTERING

LAM 515-021101-001 TOOL, QUAD, SEAL

LAM 515-025713-004 DISC.CALIB W/HOLDER STRIP 4:

LAM 515-025713-004 DISC.CALIB W/HOLDER STRIP 4:

LAM 515-025756-001 TOOL, ALIGNMENT, HTD, PDL, STRPR

LAM 515-028682-002 TOOL, ELCTD SIM, TCP, GAP

LAM 515-11835-001 PLATE

LAM 515-11835-001 PLATE

LAM 515-250015-006 DISK, CALN, PINNED LFTR

LAM 515-250015-008 DISK,CALN,PINNED LFTR

LAM 526 ROLLER BEARING

LAM 53593 PCB, MICRO-TRAC STD LINK

LAM 54-0001-003 DRIVE,HARD,6.4 GB,IDE

LAM 600-000277-001 MOTOR W/ POWER SUPPLY

LAM 600-10359-101 PCB, CPU

LAM 600865 THERMOCOUPLE TYPE J .062384-T

LAM 6008825 THERMOCOUPLE TYPE J .062384-T

LAM 600974 PCB-GALIT DMC-300-10 ASSY

LAM 601035 ISOLATOR DISH GAS FEED

LAM 601109 FILTER-CART WATER 30 MICRON

LAM 601179 BAFFLE-BOTTOM 100-125-150MM

LAM 601224 BAFFLE-TOP 100-125-150MM

LAM 601699 RETAINER TUBE WELDMENT ASSY

LAM 602218 CONNECTOR-RF TO CABLE

LAM 602250 RING INSULATOR 150MM 0.096 QTZ

LAM 605-00535-000 PCAP,MFC,TESTPOINT,B/O BD

LAM 605-016006-002 PCB,CRT ADAPTER BOARD

LAM 605-090833-001 FLOW READOUT PANEL

LAM 605-090834-001 PCB M&W INTERFACE

LAM 605-093605-001 MDL, DGTL, I/O X VME-240

LAM 605-094680-37 PCB, LIGHT PEN, DT375

LAM 605-097209-002 PCB OVERTMP TNTLK 16

LAM 605-097677-001 ASSY,PCB,DC,FLTR

LAM 637-S077402-001-02 PLUSE MW CONDENSER

LAM 637-Y077415-001-00 PLUSE MW SWITCH

LAM 643-091533-001 ATTENTUATOR RF

LAM 644-000730-001 MAIN POWER RELAY

LAM 644-060873-001 RELAY, SOLID STATE, 240V, 25A

LAM 644-0731-5 RELAY, SOLID STATE (5A)

LAM 644-093274-001 TCU, POWER SUPPLY 3P, 24V

LAM 644-5863-1 RELAY 24 VOLT

LAM 644-9691-1 COUPLING, M&W CHILLER

LAM 645-006543-001 SWITCH, MAGNETIC REED

LAM 645-009512-001 SWITCH-FLOW

LAM 645-092250-001 SWITCH, HI/LOW PRESS CONTROL

LAM 645-092897-002 SWITCH, FLOW WTR PV

LAM 645-190072-001 SWITCH

LAM 645-L007792-001-00 SENSOR

LAM 649-007321-001 CAPACTOR HIGH VOLTAGE

LAM 649-250158-001 CAP.,VAC,VAR,10-1000PF,5KV

LAM 655-037642-01 CENTER ID LABEL TRICON CABINET

LAM 655-102119-00 655 GUSSET, DEMAG. ASSY

LAM 655-102121-00 MOUNT, RETAINER DEMAG ASSY

LAM 660-001131-001 5"15 VOLT POWER SUPPLY

LAM 660-00273-000 POWER SUPPLY

LAM 660-092189-001 POWER SUPPLY

LAM 660-093827-001 PWR,SPLY,600W,2,3,4,12,15VDC

LAM 660-095586-002 PWR SPLY, QUAD OUT, 300W C E CERT

LAM 660-495679-001 GEN,RF,2MHZ,2.5KW,ONEBOX

LAM 660-7612-1 POWER SUPPLY POIONEER MAGNETICS

LAM 660-900240-001 POWER SUPPLY BATTER BACK-UPS PS/2

LAM 662-008324-002 LED INDICATOR -5 TO -14 N/C

LAM 663-091342-001 BATTERY, CONTROLLER

LAM 665-092585-001 CRT, 14", SVGA

LAM 666-009941-001 SHEATED TYPE K THERMOCOUPLE

LAM 666-009941-001 SHEATED TYPE K THERMOCOUPLE

LAM 666-090837-001 TEMP SENSOR, M&W TCU

LAM 666-094735-001 THERMOCOUPLE, DUAL 1/16" J-TYP

LAM 666-S014185-001-00 CONTROL, TEMP TC

LAM 667-S000457-001-00 SENSOR, AMP WF SW1000

LAM 667-S000457-002-00 LASER, OPTOELECTRONIC SW

LAM 667-S000461-002-00 SENSOR, SW2000

LAM 667-S000462-004-00 SENSOR, ATM SW1100

LAM 668-003032-005 CONN FEMALE HEX W/ CLAMP

LAM 668-095929-002 HDR,LKG,STR,RND PIN,2POSN

LAM 668-7671-004 4 PIN CONNECTOR M-N-LOK

LAM 670-006578-001 BREAKER, CIRCUIT, 30AMP

LAM 670-008845-001 BREAKER, CIRCUIT, 15 AMP, 115V

LAM 670-091257-001 MAIN BREAKER TCU

LAM 670-093052-063 CKT BRKR,4 POLE

LAM 673-1004042 QUARTZ GLASS

LAM 673-1008304 QUARTZ

LAM 673-1010774 QUARTZ

LAM 673-1011881 SLEEVE , QUARTZ

LAM 673-1015742 BUSHING

LAM 673-Y077413-001-00 2KW PLUSE MW POWER SUPPLY

LAM 676-000504-003 MOTOR DC 12VDC 65.5:1 RATIO

LAM 676-001677-001 MOTOR 24VDC

LAM 676-S007263-001 MOTOR DRIVER

LAM 676-S007269-008 MOTOR, STEPPING  EXT SW10

LAM 677-009090-001 GUARD WIRE FOR FAN 4"

LAM 678-007941-001 HEATER CARTRIDGE 120VAC 75W

LAM 678-009953-100 HEATER CARTRIDGE 100 WATT

LAM 678-009953-200 HEATER CARTRIDGE 200 WATT

LAM 678-035726-001 HEATER,WVDS GAS LINE #3

LAM 678-092469-001 HTR, TURBO PUMP, 1000 L/S

LAM 678-097988-001 HTR TMP HEATER

LAM 678-097988-901 HTR,TMP,2.2K LS,PM

LAM 678-097988-901 HTR,TMP,2.2K LS,PM

LAM 678-098055-002 HTR,V,ISLN,ANGLE,LOPRO

LAM 678-098188-001 HTR,MOD,VLV,ISO,ANGLE,4"

LAM 681-008300-001 WIRE-RF MATCH

LAM 681-S008420-030-00 HEATER CABLE

LAM 684-097280-008 CA,TMP CONT,OSAKA,2001,8 FT

LAM 684-097325-008 CA,TMP,OUT PUT,8FT

LAM 684-097326-015 CA, TMP,FAN,15M

LAM 684-097326-020 CA,TMP,FAN,20M

LAM 684-097327-008 CA,TMP FAN,8FT

LAM 684-097837-010 CA,MTR DR INTFC,EXT,10M

LAM 684-098060-020 CABLE, TMP OUTPUT 15 M

LAM 684-098702-005 CA,TMP PWR INP,CEMARK,5 FT

LAM 685-008451-001 HEAT MANOMETER REF

LAM 685-022617-001 MDL,ELEC,AMPL,BRUSHLESS SVO,12

LAM 685-092784-001 MANOM, CPCTNC, CDL, SER

LAM 685-094027-020 MOD,ERGO LDR 6"F CASS

LAM 685-097389-001 PUMP, TURBO, 2000 LPS, SER, TGM

LAM 685-098277-001 PEN LT W/O PCB

LAM 685-495112-106 SPEC,RPM,A6,UPS,60A TCU

LAM 685-495112-110 SPEC,RPM,A6,DPI,40A TCU

LAM 685-495681-002 MATCH, VIP, UNIFIED CTLR, ONEBOX

LAM 689-025785-006 WAFER,PHOTORESIST,PROCESSED

LAM 689-025785-008 WAFER, HMDS PRIME & SPIN

LAM 690-0341-101 UNLOAD ARM TRANSFER ASSY

LAM 70-0016-001 SOCKET RELAY

LAM 70-0016-003 SOCKET RELAY

LAM 702702500 TERM BLK,SIG TWR CNTRL

LAM 71-0002-023 CIRCUIT BREAKER 1 A.25 OV. 1POL

LAM 71-0002-024 CIRCUIT BREAKER 2 A.25 071.1 POL

LAM 71-0002-025 CIRCUIT BREAKER, 3A,25071,1POL

LAM 71-0002-026 CIRCUIT BREAKER, 7A.250V.1POL

LAM 710-022051-00 710 ASSY, CORRECTOR FORMATTER CONTROL 208

LAM 710-022370-01 PCB, 710 CTI FILTER

LAM 710-028317-10 710 ASSY ID REV B SENSOR

LAM 710-037887-01 PCB, E-SERIES BMM-RIA

LAM 710-039320-00 PCB, E-SERIES DETECTORS THR 2X2

LAM 710-039354-00 710 ASSY, CORRECTOR FORMATTER 210 LWD

LAM 710-077354-001 INTERLOCK INTERFACE PCB

LAM 713-000032-001 BUSHING

LAM 713-000032-002 BEARING BUSHING SMALL

LAM 713-000130-001 GATE STOP

LAM 713-000271-002 COVER TOP RIGHT HAND 490 N/C

LAM 713-0032-2 BUSHING,

LAM 713-006305-001 HOUSING FILTER RIGHT

LAM 713-006653-001 RING, BACKUP TEFLON (PACK OF 10)

LAM 713-006654-001 WASHER WIPER RETAINER TEFLON

LAM 713-010222-001 GUAGE, BASE GAP

LAM 713-010222-002 CAL TOOL

LAM 713-011049-003 SHIELD, WINDOW UV DUAL MONOCHROM

LAM 713-011049-005 SHIELD WINDOW UV SOLO FILEER

LAM 713-011049-006 SHIELD, WINDOW UV DUAL FILTER

LAM 713-011415-001 CLAMP, LOADCOIL

LAM 713-011578-003 SLEEVE PLUNGER GUIDE

LAM 713-011585-001 COVER, CLAMP BOLT (PACK OF 10)

LAM 713-011585-001 COVER, CLAMP BOLT (PACK OF 10)

LAM 713-011585-004 COVER CLAMP BOLT

LAM 713-011666-006 RING,FOCUS/SLEEVE COMBO

LAM 713-011802-001 CLAMP

LAM 713-011802-001 CLAMP

LAM 713-011885-001 TUBE, 8" PREFORMED KEL-F

LAM 713-011924-002 SLIT,WINDOW

LAM 713-011980-001 PLUNGER HOUSING,FOCUS RING

LAM 713-012157-001 SPACER HUB

LAM 713-012546-001 COLL HOSE

LAM 713-0130-1 AIRLOCK, GATE STOP

LAM 713-013215-001 COVER ENTRANCE TUNNEL

LAM 713-013464-003 COVER, SAFETY BOWL

LAM 713-013488-001 NOZZLE BLOCK MOUNTING LEFT

LAM 713-013489-001 NOZZLE BLOCK MOUNTING RIGHT

LAM 713-015159-001 PLATE,LOAD COIL

LAM 713-017165-001 CLAMP RF CONNECTOR (RH)

LAM 713-017166-001 CLAMP RF CONNECTOR (LH)

LAM 713-017510-001 PANEL, MEMBRAIN KEYBOARD

LAM 713-017510-001 PANEL, MEMBRAIN KEYBOARD

LAM 713-017687-001 MANF,SRC CLNG WTR,SPLY,2300 MW

LAM 713-018624-302 RING, FOCUS, 6"

LAM 713-020911-001 PLUNGER, WAFER CLAMP

LAM 713-021105-002 SPACER, WAP D-SHP TAPERED PEEK

LAM 713-021267-101 PIN, CLAMP ALIGNMENT HEAD

LAM 713-025079-002 BLK,INSUL & TC MNT,L TEM

LAM 713-025086-002 PAD INSUL

LAM 713-027192-002 NUT, 1/4-20 WAP PEEK

LAM 713-027394-002 HANGER, 1/4-20 WAP PEEK

LAM 713-027396-001 WASHER, FLAT 1/4 WAP PEEK

LAM 713-028230-001 SLEEVE BANA JACK

LAM 713-028281-001 RING CONFINEMENT

LAM 713-028553-002 RING, CONFINEMENT, VESPEL

LAM 713-029022-001 SLEEVE PLUNGER

LAM 713-029100-001 PLUNGER, WAFER CLAMP

LAM 713-029101-001 RETAINER WAFER CLAMP

LAM 713-031777-001 SCREW, COVER

LAM 713-031777-001 SCREW, COVER

LAM 713-043116-001 RING, SHROUD ALLIANCE

LAM 713-043116-001 RING, SHROUD ALLIANCE

LAM 713-044035-001 WINDOW, QUARTZ VIEW PORT 9100

LAM 713-071134-001 CAP, INSULATOR

LAM 713-071355-001 CAP TARGET MTG SCR

LAM 713-071621-002 CAP, INSULATOR, HORN MTG, 17.5MM

LAM 713-071659-001 INSULATOR, SCR, HORN MTG

LAM 713-071671-004 PLUG, ISLN HORN

LAM 713-071963-001 PLUG, TGT, IN- SITU

LAM 713-073065-001 COOL DOWN COVER (F6)

LAM 713-080573-001 COV,TOP,RE575T,SK10

LAM 713-21580-1 COVER,INSULATOR

LAM 713-21581-1 BASE,INSULATOR

LAM 713-21721-1 CLAMP,LOWER

LAM 713-220525-001 WINDOW ULPA FILTER

LAM 713-240548-001 ELETD, PTCTR ESC

LAM 713-240548-001 ELETD, PTCTR ESC

LAM 713-250067-001 ROD SUPPORT FLAG

LAM 713-250585-001 ISOLATOR TEFLON GAS FEED THRU UPPER ELECTRODE

LAM 713-330153-003 ROD ADJUSTABLE CLAMPING

LAM 713-330166-001 CLAMPING ROD COVER

LAM 713-330374-001 WINDOW, SHIELD UV ENDPOINT

LAM 713-330374-002 SHLD,WDO,UV,DUAL HTD

LAM 713-330407-001 BRACKET LATCH RIGHT

LAM 713-330461-001 TCP COIL END CAP(713-330461-001)

LAM 713-347386-001 BLOCK

LAM 713-4056-001 COVER LEXAN

LAM 713-4108-1 PLUG, VENT, TEFLON

LAM 713-432006-001 COVER, MESC SIDE, ALLIANCE

LAM 713-432007-001 RETAINER, FIBER

LAM 713-460778-001 PLT,CONN MTG,UPR MATCH,CLD GDP

LAM 713-540138-001 PLATE

LAM 713-540183-002 RING, LOWER PEEK (PACK OF 10)

LAM 713-540183-002 RING, LOWER PEEK (PACK OF 10)

LAM 713-803052-001 INSERT, GAS-INTRFMTR

LAM 713-8060-1 STANDOFF GAS FEED

LAM 713-L012527-001 VACUUM, CUP LOAD POINT

LAM 713-S014180-001-03 PLATE, TEFLON

LAM 714-001313-001 SUPPORT BRACKET

LAM 714-011072-001 BRACKET SWITCH LIMIT

LAM 714-011124-001 RING HEATER GAP ADJUST

LAM 714-011222-001 SCREEN VACUUM PORT

LAM 714-011861-001 HEATSHIELD END POINT DET

LAM 714-012242-001 LATCH INNER DOOR

LAM 714-013227-004 PLATE, CONN, BLANKOFF

LAM 714-014615-008 PNL,FRT,GEN,CT,OEM,12A,OEM,650

LAM 714-015003-001 COVER

LAM 714-015055-002 COVER, UPPER, MATCH REMOVE

LAM 714-015063-002 CONN PL, UPR FD-THRU BOX ASSY

LAM 714-015079-002 COVER INTERLOCK SWITCH

LAM 714-015134-001 CONDUCTOR,GROUND

LAM 714-019489-002 PLT.CLG MTG.2300 MWAVE

LAM 714-019956-001 BRKT,MANF,PLT.CLG MTG 2300 MWA

LAM 714-021304-001 COVER

LAM 714-021836-001 ENCLOSURE, FAN, OUTER

LAM 714-022007-001 COV,BTM.CIOM ENCL.2300 MWAVE

LAM 714-022009-001 COV,SIDE,ENCL.2300 MWAVE

LAM 714-022241-001 COV,DI VME,DC SPRT

LAM 714-024512-101 COVER SOLENOID TRAY

LAM 714-024512-101 COVER SOLENOID TRAY

LAM 714-024512-103 COVER, CA TRAY

LAM 714-024513-100 ENCL, SOLENOID TRAY

LAM 714-025051-002 CVR MTCHBOX EXT ESC

LAM 714-025958-001 SUPPORT PLATE

LAM 714-028527-001 TCP M/C MATCHER COI

LAM 714-031054-002 RETAINER UNVERSAL WDO

LAM 714-032003-004 COV,BOT,LWR MTCH ENCL,A6

LAM 714-032029-001 COV,ELEK CMPNT,FRONT

LAM 714-075327-001 MILAN FIBER TWIST MODEL MILI140 CONVERTOR

LAM 714-110249-002 PL, CLP, DBL, SLD

LAM 714-110863-001 STRAP,TWR CASE P.C B/H &WLMT

LAM 714-140242-001 STANDOFF GAS FEED 2 1/2LG

LAM 714-140259-001 STRP,GROUND

LAM 714-170128-001 BRACKET

LAM 714-190320-002 SUPPORT BRACKET

LAM 714-220204-001 RGA PORT SUPPORT

LAM 714-220204-001 RGA PORT SUPPORT

LAM 714-220748-003 VENT, 4" EXHAUST

LAM 714-222405-001 SCRN, EMI, SOL TRAY COV

LAM 714-222984-001 PL,MTG,MONOCHROMATOR

LAM 714-249190-001 HGR,LWR MATCH BOX

LAM 714-249342-001 STRAP CNTOR ESC 150MM

LAM 714-330356-001 SCREEN, RF SHIELD HEAED E.P.

LAM 714-347271-001 SHIELD

LAM 714-386008-001 COV,DIP BOX/TEMP CONT

LAM 714-443235-002 PL,MTG,BICEP PWR SPLY

LAM 714-460562-002 COVER, ELCTD HSG ESC

LAM 714-460564-002 COVER, VIA LOWER ELCTD HSG ESC

LAM 714-470572-001 VENT MOUNT

LAM 714-491416-002 BRKT,MTG,RF CONT ENCL,TALL

LAM 714-491925-001 BRKT,ENCL,XFMR,A/T

LAM 714-494492-002 COV,PCB,LWR MATCH RF INTLK

LAM 714-495015-001 COVER

LAM 714-800097-004 ENCL,AC CONT

LAM 714-802247-002 COV, RF GEN

LAM 714-810225-001 COV,PCB,NODE,DUAL V

LAM 715-000001-001 CHAMBER LOAD LOCK

LAM 715-000015-002 MOUNT BASE LOAD LOCK EXIT

LAM 715-000028-002 BOTTOM PLATE

LAM 715-000102-001 PIN DOOR GATE LINKAGE IN/OUT (PACK OF 10)

LAM 715-000185-001 COUPLING

LAM 715-000764-002 PL,LIFT,3-PIN

LAM 715-000764-002 PL,LIFT,3-PIN

LAM 715-000764-703 PL,LIFT,3PIN,2300

LAM 715-00131-001 HOUSING TEMPERATURE CONTROL

LAM 715-001388-001 ACTUATOR FOOT

LAM 715-001408-001 5"ANODIZED CATHODE

LAM 715-0015-001 BASE MOUNT OUT/DOOR

LAM 715-001626-001 SUPPORT, PCT DRIVE RF

LAM 715-002041-002 GEAR PHASE CAP

LAM 715-002054-001 SHAFT, EXIT LIFTER

LAM 715-002570-001 CHAMP,FLANGE,LONG

LAM 715-003573-003 PL,OPTICAL CONN

LAM 715-004042-001 ANODE

LAM 715-005865-001 PLATE TOP  490

LAM 715-006436-001 BARRIER ION ANODIZED

LAM 715-006584-001 GEAR SPUR MOIFIED

LAM 715-006590-001 SPINDLE, LL, FEEDTHRU

LAM 715-006590-001 SPINDLE, LL, FEEDTHRU

LAM 715-006602-001 HOUSING SEAL QUALRIM

LAM 715-007514-001 SPACER BRAKE

LAM 715-007528-001 FLANGE, MOUNT, GATE DRIVE CYLINDER

LAM 715-009128-005 ELECTRODE PLATE (715-9128-005)

LAM 715-009161-001 LIFTER, WAFER

LAM 715-009306-004 FOCUS RING

LAM 715-009306-005 FOCUS RING

LAM 715-009898-001 EDGE RING 5

LAM 715-0102-1 PIN,

LAM 715-010202-001 PLATE,JACKING SCREW

LAM 715-010213-002 TOOL CAL EDGE SNSR, 1.49

LAM 715-010237-006 DISC CALIBRATION APM

LAM 715-011005-001 HOUSING-GAP ADJUST

LAM 715-011016-001 HINGE,BOTTOM,CHAMBER

LAM 715-011035-001 PLATE, HEX, LOWER, RE

LAM 715-011039-001 RETAINER-WINDOW

LAM 715-011039-002 RETAINER UNIVERSAL WINDOW

LAM 715-011039-004 RETAINER, HEATED E.P. WINDOW

LAM 715-011051-001 FRAME, CHAMBER, WINDOW

LAM 715-011051-001 FRAME, CHAMBER, WINDOW

LAM 715-011059-001 RING ORIFICE ANNODIZED

LAM 715-0111173-001 CALIBRATION FLAG FOR GAP

LAM 715-011126-001 BRACKET ENCODER

LAM 715-011213-001 PLATE, VENT PORT 90DEG LOADLOCK

LAM 715-011214-001 PLATE VENT PORT 180DEG

LAM 715-011229-003 PLATE, SEAL, EXIT LOADLOCK

LAM 715-011420-001 PLATE

LAM 715-011492-005 HOLDER WAFER 5"

LAM 715-011502-001 COOLING RING

LAM 715-011504-001 BAFFLE, UPPER

LAM 715-011521-001 BRACKET POU GAS FILTER

LAM 715-011531-009 ELECTRODE, ANODIZED

LAM 715-011531-011 ELECTRODE, ALUMINUM, ANODIZED

LAM 715-011531-014 ELECTRODE, AL, UPPER

LAM 715-011531-014 ELECTRODE, AL, UPPER

LAM 715-011531-016 UPPER ELECTRODE

LAM 715-011531-102 ELECTRODE, UPPER, ANOD

LAM 715-011532-006 (R)PLATE UPPER SEAL

LAM 715-011559-262 WAFER CLAMP

LAM 715-011565-001 BOLT, CLAMP RETAINING

LAM 715-011565-003 BOLT

LAM 715-011570-001 SHIELD

LAM 715-011582-001 BAFFLE PLATE, LOWER AL

LAM 715-011590-001 PLATE,LOWER BAFFLE 6

LAM 715-011593-002 PLATE,SEAL,4420

LAM 715-011597-001 5MIL ELECTRODE AL AN

LAM 715-011613-002 BAR, STOP

LAM 715-011626-001 RING, COOLING LOWER ELECTRODE

LAM 715-011630-001 ELECTRODE , BOTTOM

LAM 715-011630-001 ELECTRODE , BOTTOM

LAM 715-011639-008 CAP, ELECTRODE, LOWER, 4400

LAM 715-011639-508 CAP, LWR, ROUGH, 858STR

LAM 715-011640-006 RING, AL-ANDZ LWR FOCUS ELCTD

LAM 715-011664-006 ELCTRD, LWR CAP, 6-IN NO ANDZ FLAT AL

LAM 715-011665-006 ANODE

LAM 715-011669-006 ELCTRD, LWR DOMED W/OUT PINS, AL

LAM 715-011746-142 PLATE, 4" .010 DOME REDUCED HGT

LAM 715-011823-001 ROD-MECHANICAL STOP 8.50

LAM 715-011825-001 LOWER CHAMBER PLATE

LAM 715-011858-001 PLATE WINDOW END POINT DET

LAM 715-011902-001 BAFFLE PLATE

LAM 715-011909-501 ELECTRODE, SI, CAPTIVE

LAM 715-011912-555 BAFFLE, UPPER, 4420, STR,858

LAM 715-011912-555 BAFFLE, UPPER, 4420, STR,858

LAM 715-011913-083 PLATE, BAFFLE LOWER

LAM 715-011913-083 PLATE, BAFFLE LOWER

LAM 715-011913-501 BAFFLE, LOWER

LAM 715-011913-555 BAFFLE, LOWER, 4420,STR,858

LAM 715-012025-001 SPACER 0-RING

LAM 715-012101-008 HOLDER,W/F 8",ARM EXIT

LAM 715-012111-002 COVER ARM HSG (CABLE DRIVE)

LAM 715-012126-001 TUBE ARM DRIVE

LAM 715-012165-005 5"HOLDER WAFER 5" TIGHT POC

LAM 715-012165-008 ARM, TIGHT POCKET ELL

LAM 715-012223-001 SHAFT GROVVED INNER PLATE

LAM 715-012233-002 GATE-HARD ANODIZE INNER

LAM 715-012243-001 BLOCK LATCH

LAM 715-012245-001 PIVOT, GATE, INNER

LAM 715-012251-001 BAR LATCH SOLENOID RELEASE

LAM 715-012254-001 BEARING, LATCH SOLENOID RELEASE

LAM 715-012322-001 OUTER DOOR FOR GATE DRIVE

LAM 715-013295-001 HSG,ADJ, WFR LIFT

LAM 715-013477-001 PLATE, MOUNTING

LAM 715-013718-006 CHUCK SPINNER 6"

LAM 715-013718-016 ASSY ELECTRODE

LAM 715-013772-001 COLLAR PINNED LIFTER 6"(462

LAM 715-014074-002 BLOCK MTG , GAS NOZZLE

LAM 715-014556-031 GASKET,ORIFICE

LAM 715-015092-001 BLOCK,THREADED,SEED

LAM 715-015216-001 TUBE ADAPTER

LAM 715-0166-001 CYLINDER, ARM-AIR

LAM 715-018611-117 CAP, LWR, ELECTRODE, 8"

LAM 715-018906-002 ELECTRODE, BOTTOM, BELLOW

LAM 715-018917-001 HOLDER,W/F CLAMP(462

LAM 715-018991-006 ELECTRODE, ALUMINUM, ANODIZED

LAM 715-019939-002 TUBE,MANF TO MCRWV SOURCE

LAM 715-019940-002 TUBE,MANF FROM MCRWV SOURCE

LAM 715-019942-002 TUBE,MANF TO MCRWV VLVE FROM G

LAM 715-019943-001 TUBE,MANF TO TEE FROM CHMBR

LAM 715-019944-004 TUBE,VLV TO TEE TO CHMBR

LAM 715-019945-002 TUBE,VLV TO  CHMBR

LAM 715-021092-001 SPACER

LAM 715-021274-008 CAP, LOWER ELECTRODE 8IN

LAM 715-021400-002 COVER, 180 DEG LOADLOCK, P.S. MOD

LAM 715-021507-1 CONNECTOR,MALE,VCR,MOD.

LAM 715-021719-001 COVER BELL JAR ISO ETCH

LAM 715-024347-100 PLATE,SPRT,V65,V65A,V75,V75A

LAM 715-025106-001 PLATE- LOWER BAFFLE, ESC

LAM 715-028087-005 SHROUD HARD ANODIZED

LAM 715-028420-001 CAP, L ELECTRODE FLAT PROCESS

LAM 715-028486-001 PLATE UPPER SEAL 6' ELECTRODE

LAM 715-028559-001 SHOWER HEAD 6" 4620

LAM 715-028616-001 PLATE LOWER BAFFLE 8" BOLTED

LAM 715-028620-001 PROBE, THERMAL WELL

LAM 715-028735-001 TRIPPLE BAFFLE, UPPER 852

LAM 715-028852-001 RING,CLAMP UPPER

LAM 715-030079-001 DISC. CLAMP

LAM 715-030106-006 EDGE RING

LAM 715-030106-008 RING, EDGE. 8"

LAM 715-030136-003 RING, EDGE ESC

LAM 715-031023-001 SPATULA EXIT SIDE 9600 SMIF

LAM 715-031055-001 BLK, HTD ENDPOINT

LAM 715-031513-002 RING, 1/4 TURN

LAM 715-031705-006 SPACER, SHIELD, RF

LAM 715-031753-001 ELECTRODE

LAM 715-031753-001 ELECTRODE

LAM 715-031777-002 SCREW 6-32 CPV ANODIZED

LAM 715-031960-007 PLUNGER,1/4 TURN (ANODIZED)

LAM 715-031984-003 ENDPLATE, SMALL WINDOW CHAMBER

LAM 715-031988-001 PLATE,FOR TURBO,MANOMETER SIDE

LAM 715-032012-003 PLATE, WINDOW, CHAMBER LGR

LAM 715-032012-004 END POINT WINDOW ASSY

LAM 715-032758-002 EXT ARM,PADDLE SPHERE BR G PLTD

LAM 715-032789-001 COV, TK, WTR VAPOR DLVY SY

LAM 715-038611-002 DC, BIAS PIN HOLDER

LAM 715-06213-001 SHOWER HEAD

LAM 715-062533-002 CH, CLP, COMPL, CLOS

LAM 715-072302-001 PUMP, COMPOND MOLECULAR

LAM 715-0725-001 CATHODE ANODIZED

LAM 715-07898-001 FOOT

LAM 715-080387-001 ARM, WAFER, XPORT, UNIV, 6IN, 384T

LAM 715-080554-001 PL,MT,U,ESC,ASIQ/384T

LAM 715-090184-001 SCREW, SOCKET HEAD ARM (PACK OF 10)

LAM 715-110336-002 PLATE, OUTER, GATE, SEAL

LAM 715-11059-001 RING, ORFICE

LAM 715-110709-001 PLATE, ADAPTER

LAM 715-110765-001 MTG R,AUTOTUNE 4520,L BRKT

LAM 715-11504-001 PLATE PERF ALUMINUM

LAM 715-11531-002 SHOWER HEAD

LAM 715-11629-006 LOWER CAP ELECTRODE 6"

LAM 715-11649-002 BOLT, ORIFICE RING

LAM 715-11901-005 PLATE

LAM 715-12254-001 BEARING, LATCH SOLENOID RELEASE

LAM 715-140079-001 PLATE, SEAL, UPPER ELECTRODE, 4600

LAM 715-140099-001 ESC WATER JACKET

LAM 715-140124-001 BAFFLE, UPPERTPL SET

LAM 715-140125-001 BAFFLE, LOWER OF THREE

LAM 715-140126-001 BAFFLE, TPL SET

LAM 715-140144-002 RING, CPLG, LVLG, EXP, 6, JDA

LAM 715-140153-008 RING, COUPLING, ESC 8", JDA

LAM 715-140287-001 RING,CLMP,UPR,ELECTRODE

LAM 715-140350-010 LOWER ELECTRODE CAP

LAM 715-14042028 ELECTD,AL,ANDZ,8 INCH

LAM 715-140421-026 ELECTRODE ALUMINUM 6"

LAM 715-140485-006 ELCTD (SPCL), AL, ANDZ, 6

LAM 715-160153-002 PLT MTG AUTOTUNE MATCH

LAM 715-2007-001 PIN, HINGE

LAM 715-220249-001 BRACKET, COOLING LINE, HOLD DOWN

LAM 715-220438-002 SLEEVE,FILTER,GAS FEED

LAM 715-220438-002 SLEEVE,FILTER,GAS FEED

LAM 715-222451-003 SHUTTER ARM

LAM 715-24349-100 PLATE SUPPORT

LAM 715-249241-001 SCR,GDE,LWR ELCTD,ESC

LAM 715-250544-001 GRID GROUND W/15MM HOLES FOR 9500

LAM 715-28681-001 SEAL PLATE

LAM 715-28686-001 SEAL PLATE

LAM 715-28686-002 SEAL PLATE

LAM 715-30079-001-1 TOOL, DISK CLAMP

LAM 715-300825-006 LINER, CHAMBER

LAM 715-330000-070 RING GAS INJECTION

LAM 715-330000-090 RING, GAS DISTRIBUTION

LAM 715-330000-090 RING, GAS DISTRIBUTION

LAM 715-330087-001 GAS INJECTION RING

LAM 715-330092-002 COV, NUT, BOT GAS FD W/O SLOT

LAM 715-330133-001 RING UPPER CHAMBER FIXED GAP

LAM 715-330135-001 R, BOT GAS INJ, ESC

LAM 715-330151-004 RING,ACTR

LAM 715-330152-003 SPRING ADJUSTABLE HOUSING

LAM 715-330161-002 SHLD RING

LAM 715-330161-002 SHLD RING

LAM 715-330164-006 ADJUSTMENT PLATE

LAM 715-330166-003 COV, ROD, CLPG, AL, B.A.C. (PACK OF 3)

LAM 715-330302-001 SEAL GAS FEED REAR

LAM 715-330312-001 RING, RETAINING CLIP

LAM 715-330354-002 BLK,HTD ENDPOINT

LAM 715-330394-002 BRACKET CHAMBER LINER 9400 W/PLENUM

LAM 715-330394-002 BRACKET CHAMBER LINER 9400 W/PLENUM

LAM 715-330773-001 LID ASSEMBLY

LAM 715-330825-006 LNR,CHANDER AL EXTEND ALL I

LAM 715-330825-006 LNR,CHANDER AL EXTEND ALL I

LAM 715-360197-001 GASKET, 1/2VCR DRILLED .013 CENTER HOLE

LAM 715-360268-001 PL,CHMBER TO VLV

LAM 715-4042-001 ANODE, 8"

LAM 715-412298-001 STUD, HOLD DOWN, 1/2-13X10.0, STL

LAM 715-412472-001 SPCR,MON,ALLI 6

LAM 715-42859-001 FIXTURE CENTERING RETICLE

LAM 715-442006-001 RING, RETAINER, O-RING

LAM 715-443098-001 RING, CLP, UPPER ELECRTRODE

LAM 715-443130-001 RING FOCUS OUTER AL EXELAN

LAM 715-443130-001 RING FOCUS OUTER AL EXELAN

LAM 715-443131-001 RING, GROUNDING ALUM

LAM 715-443178-202 R,EDGE,HOT,8FLAT

LAM 715-443202-001 RING, COUPLING, ESC, JEIDA, 8

LAM 715-460552-002 LINER, CHAMBER LOWER 9100/A6

LAM 715-460553-002 LINER, CHAMBER UPPER 9100/A6

LAM 715-460559-004 PIN, SUPPORT HTD LNR HASTELLOY

LAM 715-460578-001 LIFTER, WAFER 4-PIN

LAM 715-461022-001 R, CLG, ESC, UNIV

LAM 715-470821-001 PL,MTG,V,AIR OPR,GAS PALLET

LAM 715-495014-001 LINER,CHAMDER,TRNSN MANF,ADPTR

LAM 715-540057-001 TEE

LAM 715-626-1 LIFTER PISTON

LAM 715-654-1 LIFTER PISTON END

LAM 715-6602-1 HOUSING ARM SHAFT

LAM 715-666-1 LIFTER LOWER PISTON

LAM 715-802530-001 PL,ADAPT,DN200,VLV TO CHMBR

LAM 715-803220-001 SHLD,GND,DFC,300MM

LAM 715-803220-003 SHLD,GND,DFC,300MM

LAM 715-9034-1 LIFTER TOP PLATE

LAM 715-L011123-001 PLATE, CLAMP BOWL NUT

LAM 715-L011125-001 SPROCKET

LAM 715-L011628-001-00 DIVDER, FLOW

LAM 715-L011649-002 BOLT ORIFICE RING

LAM 715-L011914-001 RING, FILLER UPPER ELECTRODE,NIT

LAM 715-S010416-001 WET PINS

LAM 715-S031752-001-00 PLATE, BAFFLE UPPER NIT

LAM 715-S031754-001-00 PLATE, BAFFLE LOWER NIT

LAM 716-001163-001 RING, WAP2&3 10.35 ELECTRODE FUSED QTZ

LAM 716-001700-001 QUARTZ WINDOW

LAM 716-001835-001 INSULATOR GAP H0USING

LAM 716-001981-001 PLUNGER, LWR WFT CLAMP, KEL-F LCH

LAM 716-002483-188 INSR, FOC R, AL 203, FL, 200MM

LAM 716-003687-188 INSERT, FOCUS RING 200MM

LAM 716-003773-001 RING, WAP4 TWIST-N-LOK

LAM 716-005204-001 RING, WAP1 SMALL 10.35 ELECTRODE QTZ

LAM 716-005205-003 PLATE, COVER STEP QTZ

LAM 716-007136-001 RING, QUARTZ, UPPER, HP

LAM 716-011009-001 QUARTZ WINDOW

LAM 716-011036-001 RING, FILLER, LOWER

LAM 716-011057-002 RING,FILLER,UPPER

LAM 716-011543-003 PLATE, CER W/C ATTACHMENT

LAM 716-011563-162 CLAMP, 6-IN DOMED 1.5-MM

LAM 716-011563-168 DOMED WAFER CLAMP 6

LAM 716-011564-003 UPPER ELECTRODE

LAM 716-011573-004 PLUNGER-1/4 TURN 4420/9600

LAM 716-011623-001 RING CLAMP LOWER ELECTRODE

LAM 716-011623-001 RING CLAMP LOWER ELECTRODE

LAM 716-011624-001 RING, LOWER INSULATOR

LAM 716-011624-001 RING, LOWER INSULATOR

LAM 716-011624-005 RING,INSUL,ELEC,RDCD,HGT

LAM 716-011638-005 RING FOCUS THIN EDGE

LAM 716-011643-001 RING, CER INSUL LWR ELECTRD

LAM 716-011651-005 RING, ENDGE WAGER CLAMP 5.00

LAM 716-011651-006 RING,EDGE,WAFER,CLAMP 6.00"

LAM 716-011651-006 RING,EDGE,WAFER,CLAMP 6.00"

LAM 716-011671-001 CLAMP RETAINER 1/4 T

LAM 716-011683-008 FOCUS RING

LAM 716-011750-151 5"RING INSERT

LAM 716-011830-006 FOCUS RING,6" ALUMINA W/C

LAM 716-011830-008 RING, FOCUS (ALUMINA) 8" WAFER CLAMP

LAM 716-011889-161 CLAMP, WAFER 6

LAM 716-011909-504 PL, UPR, ELCTD, POLISH, 8 IN

LAM 716-011922-001 PLATE

LAM 716-011923-001 PLATE,WFR,CLAMP,ATTACH

LAM 716-011963-003 PLATE, CLAMP ATTACHMENT

LAM 716-011999-281 PLATE,LWR WAFER CLAMP,8''

LAM 716-012640-003 QUARTZ PLATE

LAM 716-013731-001 APM, LIFTER PAD

LAM 716-013935-118 INSR,BAFL, UV SHLD, 2300 MW ST

LAM 716-015098-001 INSULATION ELBOW LOWER MATCH

LAM 716-015597-001 RING, COVER WAP DFC 200 MM QTZ

LAM 716-016830-002 RING, WAP TWIST TOP STEP QTZ

LAM 716-016831-002 RING, WAP GENERIC QUARTZ

LAM 716-018527-426 PALTE WAFER CLAMP 8"

LAM 716-018527-430 PLATE,WAFER,CLAMP,8",.050

LAM 716-018897-001 RING INSULATOR 6"(46

LAM 716-018900-001 RING COLLED LEFT ELECT PROC. II

LAM 716-018993-001 RING EDGE 6" 4620

LAM 716-020904-018 RING FOCUS, EDGE, 1PC

LAM 716-020904-018 RING FOCUS, EDGE, 1PC

LAM 716-020905-001 RING, FILLER, BOTTOM, CLAMP

LAM 716-020906-161 CLAMP RING,DOMED W/PINS, PLATE WFR, BOT

LAM 716-020909-001 RING

LAM 716-020923-002 RING LAM COLIMATING 6-1D

LAM 716-020931-030 PLUNGER, 1/4 TURN

LAM 716-021323-001 QUARTZ FUNNEL- 8"

LAM 716-021492-001 DIRECTOR, PROCESS GAS

LAM 716-021857-001 SEAL HARMONIC ARM POST (PACK OF 10)

LAM 716-021884-001 GASKET DUCT AIR COOLED ISO

LAM 716-021894-001 BASKET, BELL JAR CLAMP, LOWER

LAM 716-027963-001 RING, WAP GENERIC

LAM 716-027967-001 RING, WAP TWIST TOP

LAM 716-028033-001 INSUL ELECT CAP PROCESS II EIP

LAM 716-028123-002 CLAMP

LAM 716-028123-002 CLAMP

LAM 716-028123-003 RING LAM FILLER CERAMIC 6-4C

LAM 716-028249-061 RING, 6" ESC

LAM 716-028249-064 RING,FOCUS,CER,LWR,MJR FLAT,9600SE

LAM 716-028414-018 RING, FOCUS

LAM 716-028447-002 DISK CERAMIC

LAM 716-028454-015 DISK,QUARTZ

LAM 716-028492-001 SLEEVE, CERAMIC THERMAL PROBE

LAM 716-028492-002 SLEEVE, CERAMIC

LAM 716-028605-402 CONFINEMENT RING

LAM 716-028688-281 PLATE, LWR WAFER CLAMP, 8" SHADOW

LAM 716-028688-281 PLATE, LWR WAFER CLAMP, 8" SHADOW

LAM 716-028688-581 CLAMP,WAFER,SHADOW NOSE

LAM 716-028721-262 CLAMP, SHADOW, CERAMIC

LAM 716-028721-268 CLAMP, PLT, WAFER JEDA

LAM 716-028739-001 CERAMIC SLEEVE

LAM 716-028740-001 BAFFLE,PLATE,9600,6"

LAM 716-029435-006 RING

LAM 716-030136-001 R, EDGE 6" ESC, MJR FL

LAM 716-031453-002 RING FILLER LOWER CHAMBER

LAM 716-031535-001 RING,CLAMP,BOT,ELETD,ESC.OX

LAM 716-031535-002 RING, CLMP, BOT, CER ESC

LAM 716-031635-002 WINDOW,STEPPED CE

LAM 716-032065-001 PLATE WAFER CLAMP

LAM 716-032119-003 QTZ BAFFLE

LAM 716-032760-008 COLLAR PINNED LIFTER 8"

LAM 716-038612-002 PIN PICK UP,DC BIAS SI CARB

LAM 716-051054-001 QTZ SHIELD SECTION, TOP PLATE

LAM 716-052017-003 SHIELD, QUARTZ QUAD, EP

LAM 716-05733-005 RING CERAMIC

LAM 716-05773-004 RING CERAMIC

LAM 716-071637-003 PLATE ISLN HORN

LAM 716-071975-001 DIFFUSER, FLNG ISO

LAM 716-072287-001 WINDOW,MICROWAVE,QUARTZ

LAM 716-11505-001 DIFFUSER CATHODE, 8"

LAM 716-11505-001 DIFFUSER CATHODE, 8"

LAM 716-11653 FILM, KAPTON .002 MICRON

LAM 716-140068-001 RING,FOCUS,ESC,6"

LAM 716-140139-211 RING,HOT EDGE,HI WALL,ESC 8"

LAM 716-140163-261 RING, HOT EDGE, 15 IN

LAM 716-140238-061 RING, UPPER, 6 IN

LAM 716-140349-010 FOCUS RING 8"

LAM 716-160170-001 WINDOW,QTZ DSQ HNG

LAM 716-1999-1 WINDOW, REAR

LAM 716-20904-018 FOCUS RING

LAM 716-249093-001 PLUG SAPPHIRE 9500 ESC

LAM 716-250514-001 CLAMP-GAS INLET UPPER ELECTRODE CERAMIC

LAM 716-28028-004 RING, LOWER, INNER, CERAMIC

LAM 716-330004-008 RING,FOCUS,HI-COND,ESC,8"

LAM 716-330004-008 RING,FOCUS,HI-COND,ESC,8"

LAM 716-330045-004 FOCUS RING

LAM 716-330045-005 R,EDGE, PH1 ESC, SEMI, 6

LAM 716-330045-262 R,EDGE,6",JEIDA,ESC

LAM 716-330068-001 CERAMIC PLATE

LAM 716-330122-002 PLATE TOP CERAMIC

LAM 716-330162-002 RING, FILLER, B.A.C.

LAM 716-330167-188 RING,CLAMP,BOT,ACTR,1.5,8"JEIDA

LAM 716-330167-261 BOTTOM CLP RING

LAM 716-330352-001 INSULATOR HEATED END POINT

LAM 716-330890-001 SHADOW RING

LAM 716-330890-006 RING CONTAINMENT, 6-IN-CHMBER, DOGDISH

LAM 716-330891-002 QUARTZ WINDOW

LAM 716-330915-001 INSUL, ESC 9600

LAM 716-331099-001 R, EDGE, 6", FL, TOP, QTZ

LAM 716-331142-005 RING, TOP WIDE EDGE

LAM 716-331142-302 R,EDGE,TP5MM,STP-300MM

LAM 716-440054-109 PLATE, FOCUS RING ADAPTOR CERA

LAM 716-440345-261 RING, CLAMP

LAM 716-440345-281 CLAMP,CERAMIC,WAFER,SHADOW

LAM 716-441044-004 QUARTZ PLATE

LAM 716-442005-001 WINDOW, PORT SENSOR XPRT CHMBR

LAM 716-443083-004 RING QTZ UPPER CONFINE CIP BIG HOLES

LAM 716-443090-002 RING, QTZ, UPR

LAM 716-460579-001 LINER, CERAMIC VIEW INSERT 9100/A4

LAM 716-460758-001 LINER, CERAMIC VIEW PORT

LAM 716-460785-007 PLATE, COOL GDP 10 HOLE

LAM 716-460916-001 RING, SILICON CARBIDE INNER 9100

LAM 716-460954-002 OUTER COVER,CMPST,FOC,RSIN6,JEIDA

LAM 716-461271-003 BAFFLE,CERAMIC,MW,STPR,AIN

LAM 716-494919-001 INS CER,HTD LNR,TOP MNT

LAM 716-494968-001 LINER, EXTENDED HEATED CERAMIC

LAM 716-800951-001 BASE, FOCUS RING 200MM

LAM 716-801451-112 BAFFLE,CHBR,2300 MW STRIPPER,A

LAM 716-L011009-001-00 WINDOW, QTZ

LAM 716-S012502-001-00 NEOSERAM

LAM 716-S070938-002-01 ELECTRODE, PRESSURE

LAM 718-025279-002 MOD,VALVE,BACK PRESSURE WATER

LAM 718-030066-002 SCREEN VENT STRIPPER

LAM 718-071761-001 VIEWPORT, SAPPHIRE, MOD CF4

LAM 718-094756-081 ELECTRODE, ESC UPPER GRAFIT

LAM 718-34255-001 HEATER, WVDS

LAM 720-000930-006 SCR, SCH CAP, 6-32 X 3/8" LG, SST (PACK OF 10)

LAM 720-000930-008 SCREW

LAM 720-000930-032 SCREW

LAM 720-000932-004 SCR, FLAT HD

LAM 720-000940-004 SCREW

LAM 720-000940-008 SCREW (PACK OF 10)

LAM 720-000940-012 SCREW SCR,SCHCAP,8-32

LAM 720-000950-006 SCREW (PACK OF 10)

LAM 720-001002-003 SCREW,PNH,PH,8-32,3/16

LAM 720-001002-004 SCREW

LAM 720-094702-012 SCREW,SOCKET HEAD CAP 8-32*(3/4)

LAM 720-252387-001 SCREW, SHAPED WINDO

LAM 721-000936-001 WASHER FLT #6 SST

LAM 721-000936-002 WSHR, LK, #6 (PACK OF 10)

LAM 721-000946-001 WASHER, FLAT, #8 (PACK OF 10)

LAM 721-000956-003 WASHER STAR #10

LAM 721-009937-001 PWM8EDC

LAM 722-000938-001 NUT, HEX, 6-32

LAM 722-000948-001 NUT, HEX, 8-35

LAM 722-000958-001 NUT, HEX, 10-32 (PACK OF 10)

LAM 722-000966-002 NUT, HEX, JAM, 1/4-20

LAM 722-007855-003 NUT

LAM 722-090514-00 NUT, NYLON W/WASHER (PACK OF 10)

LAM 723-006595-001 SPACER ARM SHAFT PRECISION N/C (PACK OF 10)

LAM 723-008913-001 SPACER ARM SHAFT PRECISION N/C (PACK OF 10)

LAM 723-550450-001 SPACER,BEARING

LAM 724-S012529-001-00 KNOCKOUT, PIN

LAM 726-006594-001 RING ARM SHAFT RETAINING (INTERNAL) N/C (PACK OF 10)

LAM 726-007499-003 CLAMP SPLIT HUB .313 SHAFT

LAM 726-090515-001 RING LOCKING (PACK OF 10)

LAM 728-061064-020 SCR. SOC HD, M5X8 SST

LAM 728-061067-035 SCR,SCHD,M10*15.35MM LG,SS T (PACK OF 10)

LAM 728-061427-008 SHCS, VENTED

LAM 728-061680-030 SCR, CHEESE HD VENT

LAM 728-061968-045 SCR. SCHD VENT

LAM 729-061056-004 WASHER (PACK OF 10)

LAM 729-061057-004 M4 SPLIT LOCK (PACK OF 10)

LAM 7293-0017-0001 MECURY ASSY

LAM 73-0001-007 ASSY,LAMP SOCKET&FOCUSING

LAM 730-037121-00 PSY730 HARN CTI PWR, PCB PLATE, EXTERIOR

LAM 730-037122-00 PSY730 HARN CTI PWR, PCB PLATE, INTERIOR

LAM 730-037321-00 PSY730 RIBBON CABLE CORR/FORM INTERCONN INT

LAM 730-037322-00 PSY730 RIBBON CABLE CORR/FORM INTERCONN EXT

LAM 730-037323-00 PSY730 HARNESS SENSOR SUPPORT EXTENSION

LAM 730-037324-00 PSY730, HARNESS, C/F TO SENSOR SUPPORT CTI

LAM 730-037445-00 PSY730, HARNESS, CHANNEL DIGITIZER, RIGHT, CHANNEL 0

LAM 730-037446-00 PSY730, HARNESS, CHANNEL DIGITIZER, RIGHT, CHANNEL 1

LAM 730-037447-00 PSY730, HARNESS, CHANNEL DIGITIZER, RIGHT, CHANNEL 2

LAM 730-037448-00 PSY730, HARNESS, CHANNEL DIGITIZER, RIGHT, CHANNEL 3

LAM 730-037449-00 30 HARNESS, SENSOR SUPPORT

LAM 730-037451-00 PSY730, HARNESS, CHANNEL DIGITIZER, LEFT, CHANNEL 0

LAM 730-037452-00 PSY730, HARNESS, CHANNEL DIGITIZER, LEFT, CHANNEL 1

LAM 730-037453-00 PSY730, HARNESS, CHANNEL DIGITIZER, LEFT, CHANNEL 2

LAM 730-037454-00 PSY730, HARNESS, CHANNEL DIGITIZER, LEFT, CHANNEL 3

LAM 730-037455-00 PSY730 HARNESS, SENSOR SUPPORT, WHITE REF. WORD LEFT

LAM 730-037462-01 30 RBN CABLE, PIXEL DATA EX

LAM 730-037462-02 PSY730 RBN CBL, PIXEL DATA EXTERIOR PCB PNL

LAM 730-037462-03 30 RIBBON CABLE, PIXEL DATA EX

LAM 730-037462-04 30 RIBBON CABLE, PIXEL DATA EX

LAM 730-037463-01 PSY730 RBN CBL, PIXEL DATA INTERIOR PCB PNL

LAM 730-037463-02 30 RIBBON CABLE, PIXEL DATA IN

LAM 730-037463-03 30 RIBBON CABLE, PIXEL DATA IN

LAM 730-037463-04 30 RIBBON CABLE, PIXEL DATA IN

LAM 730-037464-01 30 RIBBON CABLE, CTI TO INTCNC

LAM 730-037464-02 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR

LAM 730-037464-03 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR

LAM 730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR

LAM 730-037465-01 30 RIBBON CABLE, CTI TO INTCNC

LAM 730-037465-02 PSY730 RBN CBL, CTI TO INTCNCT PNL EXTERIOR

LAM 730-037465-03 30 RIBBON CABLE, CTI TO INTCNC

LAM 730-037465-04 30 RIBBON CABLE, CTI TO INTCNC

LAM 730-037466-01 30 RBN CBL, CORR/FORM TO PSY730 RBN CABLE

LAM 730-037466-02 PSY730 RBN CBL, CORR/FORM TO INTCNCT PNL

LAM 730-654131-001 CABLE REMOTE EPO

LAM 733-S009002-044-00 O-RING, DOOR GATE

LAM 734-000982-001 O-RING 1.75 X .06 CROSS SECTION

LAM 734-001899-001 O-RING

LAM 734-00228-001 O-RING

LAM 734-00230-001 O-RING

LAM 734-005271-001 O-RING, LOAD LOCK FILTER

LAM 734-005632-001 O-RING

LAM 734-006760-001 O-RING, 7.50ID X 1/8 C/S

LAM 734-007314-001 O-RING, 7/8 I.D. X 1/8 CS (PACK OF 10)

LAM 734-007335-001 O-RING, ARM 11/16 X 1/16, VITO (PACK OF 10)

LAM 734-007335-003 O-RING, PLL ARM SHAFT SEAL

LAM 734-007357-001 O-RING  10.00 ID X 1/8 C/S

LAM 734-007358-001 O-RING  13.00 ID X 1/8 C/S

LAM 734-007358-001 O-RING  13.00 ID X 1/8 C/S

LAM 734-007359-001 O-RING, 14.0 ID X 1/8 C/S VITON

LAM 734-007461-001 O-RING

LAM 734-007461-001 O-RING

LAM 734-007524-209 O-RING, CHEMRAZ ID.671 CSD.139  SSE38

LAM 734-007699-001 O-RING ELM164

LAM 734-007762-001 SEAL QUAD

LAM 734-007762.001 O-RING (SEAL)

LAM 734-008123-001 O-RING

LAM 734-008123-001 O-RING

LAM 734-008722-001 O-RING

LAM 734-008771-001 O-RING, .468 I.D., REAR WINDOW (PACK OF 10)

LAM 734-008793-001 O-RING, 7 3/4 X 1/8 X S VIT

LAM 734-008819-001 O-RING (PACK OF 10)

LAM 734-009065-001 O-RING (PACK OF 10)

LAM 734-009249-001 O-RING

LAM 734-009250-001 O-RING, 5.0 I.D., QUARTZ WINDO

LAM 734-009800-001 O-RING

LAM 734-009868-001 O-RING

LAM 734-009908-001 O-RING

LAM 734-010736-001 O-RING,LINER,CHMBR,300MM

LAM 734-012794-001 O-RING, KALREZ, 8575, SHAPED RND

LAM 734-021867-001 O-RING LOWER DSQ ARM HOUSING CHE AS-568A-150

LAM 734-021886-002 AS-568A O-RING K#238

LAM 734-022231-116 O-RING,PERLAST,0.737 ID X .103 C/S

LAM 734-022231-134 O-RING,PERLAST,1.862 ID X 0.103 C/S

LAM 734-022231-160 O-RING,PERLAST,5.237 ID X .103 C/S

LAM 734-022231-168 O-RING,PERLAST,7.237 ID X 0.103 C/S

LAM 734-022231-269 O-RING,PERLAST,8.734 ID X 0.139 C/S

LAM 734-022231-278 O-RING,PERLAST,11.984 ID X 0.139 C/S

LAM 734-023967-707 O-RING, SILICON PFA

LAM 734-035207-733 O-RING,PERLAST G74PSCMS

LAM 734-061280-006 O-RING LIFT TUBE FEEDTHRU (PACK OF 10)

LAM 734-061280-010 O-RING, VITON, .239 ID X .070 C/S

LAM 734-061280-017 O-RING

LAM 734-061280-029 O-RING

LAM 734-061280-130 O-RING

LAM 734-061280-231 O-RING (PACK OF 10)

LAM 734-061280-265 O-RING,VITON,2-265

LAM 734-061280-278 O-RING (PACK OF 10)

LAM 734-061280-453 O-RING, VITON SER 2, 11.975 X .060

LAM 734-061716-001 GASKET, VITON

LAM 734-061978-001 O-RING, CHEMRAZ ID.029 CSD.070  SC513

LAM 734-061978-004 O-RING CHUCK UNIVERSAL

LAM 734-061978-274 O-RING, AS568A-274 CHEMRAZ

LAM 734-061978-310 O-RING

LAM 734-061978-364 O-RING MAIN ISO VALVE (AS-568A-364)

LAM 734-07356-001 O-RING, Outer Gate Outer

LAM 734-08546-001 O-RING, ARM INNER

LAM 734-090516-001 O-RING

LAM 734-090743-001 O-RING (PACK OF 5)

LAM 734-090743-001 O-RING (PACK OF 5)

LAM 734-090788-001 O-RING

LAM 734-091193-001 O RING VITON

LAM 734-091228-001 O RING 9 1/4 ID X 3/32

LAM 734-091228-200 O-RING,KALREZ

LAM 734-092040-003 O-RING, GAS INNER

LAM 734-092069-001 O-RING.675 IDX3/32 C/S

LAM 734-092559-013 O-RING .070 DIA C/S FSI

LAM 734-092559-016 O-RING, FLUOROSi ID.614 CSD.070  (PACK of 10)

LAM 734-092560-167 O-RING (PACK OF 10)

LAM 734-092561-216 O-RING, 1.109ID X.139 C/S (PACK OF 10)

LAM 734-092561-229 3-PIN O-RING

LAM 734-092561-264 O-RING,INNER DOOR WIN SEAL

LAM 734-094437-001 O-RING, 12.505 ID X .210 CS VITON

LAM 734-095412-001 O-RING

LAM 734-09909-001 O-RING, 4"DI FOR LAM

LAM 734-09910-001 O-RING 3" DIA FOR LAM

LAM 734-706000-001 O-RING

LAM 734-7369-1 RING, QUAD

LAM 734-9869-1 O-RING

LAM 737-S009021-008-00 RING, QUAD X RING

LAM 739-001856-001 SEAL FLANGE

LAM 739-098594-001 O-RING, PENDULUM

LAM 739-098594-001 O-RING, PENDULUM

LAM 742-060786-006 GKST, CONFLAT, 8" ELE NKL PLT

LAM 742-093181-003 GSKT,RF,BECU O-RING

LAM 742-093181-003 GSKT,RF,BECU O-RING

LAM 742-443232-005 GSKT, EMI, SST, O-RING, LOW FORCE

LAM 745-01408-001 CATHODE ANODIZED

LAM 746-000219-001 BEARING, GATE LINKAGE BALL (PACK OF 10)

LAM 746-000221-001 BEARING GATE ASSY (PACK OF 10)

LAM 746-006600-001 BEARING ARM DRIVE BALL PRECISION (PACK OF 10)

LAM 746-008545-001 BEARING BALL

LAM 746-06219-001 BEARING

LAM 746-062354-001 BAG LINEAR OPEN

LAM 746-094249-001 BEARING, 10MM

LAM 746-097904-001 BRG, WHL, GDE, 250MM

LAM 746-6600-1 BEARING, LOWER ARM HOUSING

LAM 746-L007652-001-00 BEARING, GAP

LAM 748-250053-002 GR,SPUR,SPLIT HUB,108 T,72 P

LAM 749-006596-001 COLLAR ARM SHAFT PRESISION N/C (PACK OF 10)

LAM 749-097234-001 COUPLER, LOFAT

LAM 749-250173-001 RDCR,BORE,.25 ID,.31 OD,.63 LG (PACK OF 10)

LAM 749-L007984-001 COUPLING, ENCORDER

LAM 750-007782-001 CHAIN GAP DRIVE (HARLEY)

LAM 751-S032271-001 CLAMP ALUMITE

LAM 752-000227-007 PIN, DOWEL .125 DIA X 7/16 LG (PACK OF 10)

LAM 752-000236-001 ROLL PIN 1/8 DIA X 3/4 N/C (PACK OF 10)

LAM 752-004083-001 SHAFT, PERECISION .125X1.875

LAM 752-061873-003 PIN, QUICK RELEASE,5/16 DIA

LAM 752-550437-001 SHAFT,COUPLING

LAM 754-007751-001 SPRING, TENSION

LAM 754-007791-001 SPRING,GAS

LAM 754-007791-001 SPRING,GAS

LAM 754-090359-015 SPRING, COMPRESSION, 3/8 X 1 3 (PACK OF 10)

LAM 754-090457-009 SPRING COMPRESSION (PACK OF 10)

LAM 754-092082-002 GUIDE BEARING & SPR ASSY

LAM 754-092082-002 GUIDE BEARING & SPR ASSY

LAM 756-007126-007 SCREW ARM CYLINDER SHOULDER (PACK OF 10)

LAM 760-021194-00 ASSY CUSTOM DEMAG LENS II LEFT

LAM 760-042076-01 ASSY CUSTOM DEMAG LENS II RIGHT

LAM 764-4608 BALL JOINT

LAM 765-007787-001 SPROCKET DRIVE 2.873PD.500B

LAM 765-008016-004 HUB MOUNTING

LAM 766-000433-001 VALVE,SOLENOID,24V7/80D

LAM 766-000434-001 3 WAY 24V

LAM 766-009543-002 VALVE,CHILLER,LINE,SS

LAM 766-009593-002 REGULATOR,PRESSURE,TEFLON

LAM 766-009866-050 BELLOWS NW50

LAM 766-061763-001 VALVE, BELLOWS

LAM 766-090688-00 TIMER,PNEUMATIC,7.0

LAM 766-090814-001 ACTUATOR ASSY

LAM 766-090815-001 ACTUATOR, ASSY N.O. VERIFLOW

LAM 766-090815-001 ACTUATOR, ASSY N.O. VERIFLOW

LAM 766-090816-001 KIT, REBUILD VERIFLOW VALVE MANUAL,ADV

LAM 766-092079-601 GT MECH DRY BRG COMPL.

LAM 766-901055-001 VALVE,TWO,3 WAY VALVE,SMC

LAM 766-9866-40 KIT BELLOWS ASSY

LAM 766-L009371-008-00 CONTROL, FIXED FLOW

LAM 766-L009866-080 BELLOWS, P C ISO

LAM 766-S006420-012-00 VALVE, SOLENOID AIR OPE SW10 20

LAM 768-091910-001 ATMSWITCH, VACUUM ATMOSPHERE,NON-ADJ

LAM 768-093959-001 SWITCH-PRESSURE 75 TORR

LAM 768-093959-200 SWITCH, PRESSURE, VACUUM,125 TORR,PSH3,200

LAM 768-093959-200 SWITCH, PRESSURE, VACUUM,125 TORR,PSH3,200

LAM 768-095454-001 ACTUATOR, POSITION

LAM 768-900619-100 XDCR,MMVCR,5RA,HOR,W DISPLAY

LAM 768-900619-100 XDCR,MMVCR,5RA,HOR,W DISPLAY

LAM 770-007494-001 CYLINDER ARM DRIVE 3/4 BORE

LAM 770-007575-002 CYLINDER,1/2 BORE NICKET PLT

LAM 770-550281-001 AUTODOOR CLAMP CYLINDER

LAM 771-004104-001 TUBE, CONNECTION

LAM 771-04104-001 CONVECTRON TUBE

LAM 772-008458-001 PLUG MANIFOLD PORT LAM 4500

LAM 772-009188-001 FILTER 1/ NPT

LAM 772-090397-001 REGULATOR COMPACTS 1

LAM 772-091421-001 HOUSING, FILTER

LAM 772-092806-100 RGLTR SQ60,0-30 PSIG OUT

LAM 772-093113-001 REGULATOR MICRO SST VCR MM RA10

LAM 772-094236-010 WLDMT,SET PRESS,RGLTR,10 PSI

LAM 772-470656-001 RGLTR,3-PORT & GAUGE,10Ra

LAM 775-009935-001 ELEMENT, H2O FILTER

LAM 775-009973-001 FILTER ELEMENT HI-TEMP 4420

LAM 775-009974-001 FILTER ELEMENT DI HI TEMP

LAM 775-100487-001 FLTR,VNT CRMC

LAM 778-091827-011 ANAFAZE,CONT,MLS-16,EMC

LAM 778-091827-502 CONT,TEMP,W/HALBD,RTD/CH5

LAM 780-680082-00 RETROFIT KIT, TOP PLATE, MARK 2

LAM 780-680130-00 RETROFIT KIT, TOP PLATE, MARK 2, RIGHT

LAM 790-007785-003 BRAKE, GAP, ELECTRIC

LAM 790-008339-003 SNUBBER SHAFT STROKE

LAM 790-013004-195 TIMING BELT

LAM 790-092081-001 CRANKBOLT

LAM 790-095243-001 FLAG, DOOR, UP/DOWN

LAM 790-095245-001 FLANGE, SENSOR

LAM 790-097959-001 VALVE ASSY

LAM 790-098558-001 LINER,EXTNSN,QTZ

LAM 790-098560-003 HEATER,GAS,LN,HTD,MWAUE

LAM 790-130044-195 BELT, TIMING

LAM 790-250171-001 BELLOWS LIFT PINS 9500

LAM 795-009619-001 FILTER,OPTICAL,480NM

LAM 795-090066-001 FILTER, ENDPOINT 77

LAM 795-090330-001 LENS,END POINT DETEC

LAM 795-091097-001 EBOW,FIBER OPTIC

LAM 795-093551-006 CA,FBR OPTIC,.13"D x 16.50"LG

LAM 796-000233-002 SEAL CENTERING KF 40

LAM 796-000233-003 SEAL. CENT. RING ASSY, NW50

LAM 796-000233-004 SEAL CENTERING RING NW 10

LAM 796-000233-005 SEAL NW 16 CENTERING RING

LAM 796-000719-001 GASKET, VCR, UNPLATED NICKLE

LAM 796-001233-001 CLAMP, NW25,AL

LAM 796-001582-001 HOSE, CORR, METAL KF50

LAM 796-002672-001 GASKET KIT

LAM 796-002673-001 TIP, STEM KEL-F,GASKET,INSERT

LAM 796-002673-002 INSERT

LAM 796-006759-001 GASKET NICKEL W/RETAINER 1/4"

LAM 796-007432-102 GEN VAC NO-SWITCH

LAM 796-008354-008 SCREW, SOC HD,VNTD, 6-32 X 3/4 (PACK OF 10)

LAM 796-008792-012 SCREW, VENTED 10-32 X 3/4 (PACK OF 10)

LAM 796-008976-002 SEAL, CENTERING RING NW80

LAM 796-008976-003 CENTERING SEAL ASSY

LAM 796-008976-005 CENTERING RING

LAM 796-008976-006 SEAL, CTRG/SEAL ASSY, NW 250

LAM 796-009209-010 SCREW (PACK OF 10)

LAM 796-009209-010 SCREW (PACK OF 10)

LAM 796-009240-016 BENT SCREW SHCSSVNTCLN3/8-16?1"

LAM 796-009361-001 ASSY, HOSE, MTL.NW80, 20"L

LAM 796-009363-003 FLANGE,BLANK-OFF

LAM 796-009364-001 ASSY, HOSE MTL NW80

LAM 796-009365-001 ASSY, HOSE, MTL, NW40

LAM 796-025605-001 DILUTION SYSTEM, HYDROGEN

LAM 796-090063-001 SEAL CNTRN6 RN6NW 10/NW16

LAM 796-090534-001 VALVE, 1/4 BTT WLD, NRMLY CLSD

LAM 796-090548-001 COUPLING CLOSE 1/4 VCR F-F

LAM 796-090716-001 ASSY, HOSE MTL NW100

LAM 796-090768-001 VALVE 1/2 BTT WLD NRMLY CLSD

LAM 796-090807-001 GATE VALVE ASSY

LAM 796-091814-002 KIT, FUJIKIN ACTUATOR NO

LAM 796-091815-001 DIAPHRAGM, FUJIKIN VSEAL9600

LAM 796-091902-102 VLV, GT, CNTRL 200MM FIG

LAM 796-091925-002 VAT VALVE ASSY

LAM 796-091975-003 VALVE,PTX TURBO ISO VALVE

LAM 796-092372-001 KIT, O-RING REPLACEMENT

LAM 796-092798-001 VLV,PNEU

LAM 796-093055-001 SEAL KIT BONNET

LAM 796-093088-004 CONTROLLER,ADAPT PRESSURE VLV

LAM 796-094065-250 RING, CENTERING CHEMRAZ VATHSG

LAM 796-095450-002 V,1/4 FACE SEAL,M-IN,M-OUT

LAM 796-095768-001 SHLD, SPLINTER, 1K TURBO PMP

LAM 796-097155-001 O-RING,TOP PLATE

LAM 796-098649-001 LKG BALL SET,VAT 64 200MM

LAM 796-099248-001 ELB,UN,45 DEG,11Ra,SST,1/4

LAM 796-220744-001 GASKET

LAM 796-360004-001 ACTR VALVE COMPACT VAC

LAM 796-441317-003 VLV,SER65,DN250,CHEMRAZ W/FSI

LAM 796-L000716-001-00 VALVE, CHECK

LAM 796-S002925-013-00 VALVE, SOLENOID GATE VALVE SW2000

LAM 796-S002925-014-00 VALVE, SOLENOID SW1000, 2000

LAM 799-110332-001 INDX,SMIF,150MM,SEND

LAM 799-130053-003 ASSY,INT CONT BOX SEND

LAM 799-550187-001 BELLOW,VCE

LAM 799-550235-001 FLANGE, PHOTOSENSOR

LAM 799-550644-001 DR,ASSY,BLWS,TPI,VCE 6

LAM 799-901177-001 LPM, SMIF, 200MM

LAM 799-901177-002 LPM, SMIF, 200MM

LAM 80-0002-042 CABLE,FIBER OPTIC,.04,THRE

LAM 80-0002-068 SENSOR,HALL EFFECT PN

LAM 800555 SHAFT,BRSH,XPRT

LAM 801018 TRANSFORMER P8662 24V/2A STANCOR TRANSFORMER384-T

LAM 810-000392-001 PCB,SERIAL I/O

LAM 810-000474-001 PCB, POWER DRIVER CARD

LAM 810-000474-001 PCB, POWER DRIVER CARD

LAM 810-000671-001 PCB KEYBOARD

LAM 810-001634-001 PEDESTAL, TI

LAM 810-001915-003 ASSY,PCB END POINT DETECTOR

LAM 810-00392-001 PCB, S10

LAM 810-004092-001 RF INTERFACE BOARD

LAM 810-004092-001 RF INTERFACE BOARD

LAM 810-008566-001 PCB MOTOR DRIVER

LAM 810-009435-001 PCB, MFC EXTENDER

LAM 810-012073-001 SHIELD, AL

LAM 810-017001-001 MOTHER BOARD

LAM 810-017003-001 PC BOARD DIP

LAM 810-017003-001 PC BOARD DIP

LAM 810-017003-002 ASSY, PCB

LAM 810-017004-001 SOLENOID INTERLOCK PCB

LAM 810-017007-001 PCB, CONVECTRON TUBE

LAM 810-017008-001 PCB, TEMP SENSOR AMP

LAM 810-017008-004 ASSY,PCB,TEMP SENSOR AMP

LAM 810-017010-001 PCB

LAM 810-017013-001 PCB, AMP INTERLOCK

LAM 810-017013-001 PCB, AMP INTERLOCK

LAM 810-017016-001 PCB, MOTOR DRIVE STEP

LAM 810-017016-001 PCB, MOTOR DRIVE STEP

LAM 810-017017-001 PCB EDGE SENSOR

LAM 810-017018-002 ASSY,PCB,GAP MOTOR CONTROLLER

LAM 810-017018-002 ASSY,PCB,GAP MOTOR CONTROLLER

LAM 810-017021-001 PCB, LIFTER FILTER

LAM 810-017023-001 EXTENSION CARD

LAM 810-017025-003 PCB, BREAKOUT, RF, GEN, CART

LAM 810-017026-001 PCB,TEMP,CONTROL

LAM 810-017027-003 PCB ASSY

LAM 810-017029-001 PCB, DC BIAS NEG. PEAK DETECT

LAM 810-017030-005 ASSY PCB, GAS PANEL

LAM 810-017030-005 ASSY PCB, GAS PANEL

LAM 810-017031-002 PCB,ASSY,ADIO-AO

LAM 810-017031-003 PCB,ADIO

LAM 810-017031-004 PCB,ASSY,ADIO-AO

LAM 810-017031R004 RFRB ASSY, PCB, ADIO-AO

LAM 810-017032-001 ASSY PCB RF SENSER

LAM 810-017033-003 PCB,SRAM,MOD,

LAM 810-017035-001 PCB, SASI ASSY

LAM 810-017035-001 PCB, SASI ASSY

LAM 810-017038-001 PCB,SERIAL,SI/O,EXTENDER

LAM 810-017038-002 PCB, SERIAL I/O-2

LAM 810-017038-002 PCB, SERIAL I/O-2

LAM 810-017041-001 PCB,ASSY,BRUSHLESS MOTOR DRIVER

LAM 810-017048-002 PCB HEATER CONTROLLER ASSY

LAM 810-017057-001 STRIPPER ASSY PCB

LAM 810-017058-002 PCB, GAS, PANEL, MOTHER, BRD

LAM 810-017059-001 PCB, GAS, PANEL, INTERLOCK

LAM 810-017082-001 ASSY PCB 16 CHAN HEATER/COOL

LAM 810-017082-001 ASSY PCB 16 CHAN HEATER/COOL

LAM 810-017086-106 ASSY, PCB, ESC PWR SPLY, DC BIAS

LAM 810-017093-001 PCB, ASSY GAP MOTOR CONTROLLER

LAM 810-017098-001 ASSY, PCB GAP DRIVE AMPL INTLK

LAM 810-018077-001 INSULATOR

LAM 810-025368-001 ASSY, PCB, RELAY

LAM 810-025368-001 ASSY, PCB, RELAY

LAM 810-025369-002 PCB-RESISTIVITY PCU

LAM 810-034802-001 TCP RF SENSOR BOARD

LAM 810-034808-002 PCB TURBO/RF INTERLOCK

LAM 810-034808-003 ASSY TURBO/RF INTERLOCK PCB

LAM 810-04761R SHIELD

LAM 810-04764 COVER BELLOWS

LAM 810-04764R COVER BELLOWS

LAM 810-0503-001 PCB, CONTROL RF MATCH

LAM 810-0530-001 PCB, DRIVER MOTOR

LAM 810-06306R SHIELD

LAM 810-077044-001 EMO/INTERLOCK DIST PCB

LAM 810-077121-001 PCB

LAM 810-077146-001 ADIO/PCB

LAM 810-077290-001 PRES XDCR I/F PCB

LAM 810-077365-001 PRPHL HARDWARE INTLK

LAM 810-077366-001 PERIPHERAL I/O MOTHERBOARD

LAM 810-077383-001 LED BOARD INTERLOCK/EMO

LAM 810-077388-001 HOST CONTROL BD

LAM 810-077391-001 GAS INTLK PCB

LAM 810-077393-002 CHAMBER INTERFACE PCB

LAM 810-077394-001 MAGNET P/S INTERFACE

LAM 810-077434-001 CHILLER INTERFACE PCB

LAM 810-077498-002 PCB ASSY,PCB,COOLING,STATTION

LAM 810-07930-001 PCB, COMBO

LAM 810-092388-001 COMMUNICATION ADAPTER

LAM 810-10236R CUP, UNDERCOATER, ACT8

LAM 810-1314-1 PCB, DIGITAL I/O

LAM 810-1316-002 PCB, CPU 7803

LAM 810-17002-003 PCB, I/O BRKOUT ASSY

LAM 810-17008-001 PCB TEMP SENSE AMP, REV.E

LAM 810-17012 HEARTBEAT PCB

LAM 810-17012-002 PCB,HEARTBEAT

LAM 810-17013-001 PCB, GAP DRIVE CONTROL

LAM 810-17016-001 PCB STEPPER MOTOR DRIVE

LAM 810-17025-003 PCB, RF GEN CART BREAKOUT

LAM 810-190460-002 PCB

LAM 810-1984-001 PCB, DRIVER MATRIX-CRT

LAM 810-370182-001 ASSY PCB DTRBD, PWR SUPP

LAM 810-370845-002 Board;Inter Lock Board

LAM 810-490009-001 PCB BOARD

LAM 810-490656-001 ASSY, PCB ALLI PM BREAKOUT

LAM 810-492524-001 PCB, AI MUX 9100

LAM 810-495659-006 ASSY PCB PWR SPLY ESC BI

LAM 810-50523R RING, UPPER SHIELD

LAM 810-50525R SHIELD

LAM 810-50526R TWAS, GROUND SHIELD

LAM 810-50527R TWAS, RING, UPPER SHIELD

LAM 810-50535R DUMMY WAFER

LAM 810-50536R TWAS, GROUND SHIELD

LAM 810-52060R RING, UPPER SHIELD

LAM 810-53224R SHUTTER PLATE COVER

LAM 810-55126R GUARD RING, INSULATING

LAM 810-56254R UPPER SHILED, (LTS-300A)

LAM 810-56256R LOWER SHIELD

LAM 810-56257R PLATTER RING

LAM 810-56259R DUMMY WAFER

LAM 810-56626R DESPO, SHIELD

LAM 810-56627R BAFFLE PLATE

LAM 810-56902R LINER LOWER THROTTLE

LAM 810-57045R PIPING 80A SUS316-519336

LAM 810-810193-001 ASSY,PCB,MTHBD,VTM

LAM 811-02362R CERAMIC PUMPING INSERT

LAM 811-050200-001 BELL JAR

LAM 811-051014-001 RING, GAS TRENCH COVER

LAM 811-05564R OUTER SHIELD

LAM 811-05726R INSULATOR, RING

LAM 811-50247R RING, UPPER SHIELD

LAM 811-50272R INNER SHIELD

LAM 811-51059R DEPO SHIELD, CHAMBER A

LAM 826-033174-001 S/W, SERIES II/SYNERGY, V

LAM 833-001899-002 CA,ASSY GEN/TCP MTCH

LAM 833-003542-018 CA,COAX,RG214,HN90-HN90

LAM 833-802187-029 ASSY,CA,COAX,RF GEN/TCP MTCH,2

LAM 833-810197-005 ASSY,CA,AC RACK,RPDB,100FT

LAM 838-024486-100 MANIFOLD GAS DELIVERY

LAM 839-000869-001-F CONNECTOR, FOR GAS LINE

LAM 839-002195-001-D GAS LINE

LAM 839-002426-001-D GAS VALVE

LAM 839-002445-100 FLOW ASSY

LAM 839-005538-001-B GAS LINE

LAM 839-005904-001-C GAS VALVE

LAM 839-007547-001 WELDMENT, MNFLD, REACTION CHMBR

LAM 839-007823-001 GAS LINE

LAM 839-011021-001 WELDMENT GAS FEED TUBE UPPER

LAM 839-011023-001 WELDMENT FLANGE

LAM 839-011025-001 WELDMENT, MANO, ISO

LAM 839-011237-001 WELDMENT,LL

LAM 839-011516-001 WELDMENT GAS FEED LINE

LAM 839-011520-001 WELDMENT,GAS,FEEDLINE,FLEX

LAM 839-013259-001 WELDMENT PLATE MANIFOLD CHMBR

LAM 839-013259-001 WELDMENT PLATE MANIFOLD CHMBR

LAM 839-013512-001 GAS LINE

LAM 839-013512-001-A GAS LINE

LAM 839-013513-001 WELDMENT MANIFOLD ENT II VAC

LAM 839-013514-001 EXIT L/L VAC LINE

LAM 839-013517-00 WELDMENT,XLL,SOFTPUMP

LAM 839-013517-002 WELDMENT ELL SOFTPUMP

LAM 839-013517-002 WELDMENT ELL SOFTPUMP

LAM 839-013559-001-A GAS LINE

LAM 839-013559-003-A GAS LINE

LAM 839-013597-001 WELDMENT PUMPLINE

LAM 839-013874-001 MANIFOLD,WELDMENT, OXE

LAM 839-013874-001 MANIFOLD,WELDMENT, OXE

LAM 839-013900-001 VALVE, ISOLATION, OXE

LAM 839-014578-101-A CONNECTORS, FOR TUBING

LAM 839-014597-001-A GAS LINE

LAM 839-014703-001-A GAS LINE

LAM 839-014705-001-A GAS LINE

LAM 839-014706-001-A GAS LINE

LAM 839-014929-100-B GAS LINE VENT, WELDMENT

LAM 839-014929-200-A GAS LINE

LAM 839-014936-200-A GAS LINE

LAM 839-014939-001 WELDMENT, HE GAS ELBOW

LAM 839-015480-003 ELECTRODE, UPPER .28STEP EXELAN

LAM 839-021147-002 WLDMT,MOUNT,TEMP PROBE

LAM 839-021508-1 KNOB,PLASTIC,MODIFIED

LAM 839-021930-001 WELDMENT ISO VALVE ISO ETCH

LAM 839-021930-001-A GAS LINE

LAM 839-024320-100 WELDMENT,PMP PRG MANIFOLD

LAM 839-024326-100 GAS LINE

LAM 839-024354-100 VALVE,VENT,XLL

LAM 839-024373-100-A GAS LINE

LAM 839-024397-100-B GAS LINE

LAM 839-024447-100 WELDMENT, HE V AC LINE, HI CONDT

LAM 839-024498-100 WELDMENT HELIUM & VACUUM TUBE

LAM 839-024561-100 GASLINE

LAM 839-029055-001-A GAS LINE

LAM 839-029227-102 WELDMENT HE L W/MANOM ADPTR

LAM 839-029228-100 WELDMENT V-90 HE

LAM 839-029355-001 WELDMENT, RGA

LAM 839-029356-001 WELDMENT, VALVE, RGA

LAM 839-029356-001 WELDMENT, VALVE, RGA

LAM 839-030633-001 PLUG, GROUNDING

LAM 839-030998-001 ASSY,HTR VLV BODY

LAM 839-031455-001 WELDMENT GASLINE

LAM 839-032171-001 WELDMENT, ADAPTOR, VENT DUCT

LAM 839-032922-001 TURBO PUMP N2 GASLINE

LAM 839-032968-001-A GAS LINE STRAIGHT SECT. NW40, 320 MM

LAM 839-044404-001-A GAS LINE

LAM 839-051600-002 GAS PIPE RING

LAM 839-055039-001 GAS RING

LAM 839-093786-001 BELLOWS, MESC SLOT VALVE

LAM 839-110146-001 TCU, WLDMNT, DI RTN/FLOW SW

LAM 839-140210-001 ASSY CVR ESC RB OXD

LAM 839-170110-001 WELDMENT PRI ISO HE

LAM 839-170130-101 WELDMENT VENT EXIT LL

LAM 839-180021-002-A GAS LINE

LAM 839-220203-001 SPOOL, KF-25, RGA-PORT, 2.5" LG

LAM 839-220405-001-A CONNECTOR, FOR TUBING

LAM 839-249279-001-E2 BRACKET

LAM 839-250225-001-A GAS LINE

LAM 839-330016-001 FITTING.BOTTOM FE

LAM 839-330300-010 WLDMT, FTG BOT GAS FEED, EP

LAM 839-330423-001-C GAS LINE

LAM 839-331035-001-E1 GAS LINE

LAM 839-331155-001 WLDMT,TOP GAS DISTRN

LAM 839-331158-003 WLDMT,FLG,CHMBR INL,TOP

LAM 839-347061-002 WLDMT,N2 PRG LINE,WVDS

LAM 839-350002-001 WELDMENT MN BLST

LAM 839-350003-001 WELDMENT ORF HE

LAM 839-350005-002 WELDMENT HE EVAC LWR MTCH BOX

LAM 839-350018-002-E3 GAS LINE

LAM 839-350038-910 WELDMENT

LAM 839-350039-910 WLDMT,BLST,ENTR LL,ESC

LAM 839-35704-001 GAP CHAIN ALR (PACK OF 10)

LAM 839-360034-001-D GAS LINE

LAM 839-360111-002-B GAS LINE

LAM 839-360247-002 ASSY,RGHG BYP,UNIV,HTD

LAM 839-410222-001-E1 GAS LINE

LAM 839-410222-03-A GAS LINE

LAM 839-440462-108 ELECTRODE, ESC 9100

LAM 839-441891-001-A GAS LINE

LAM 839-442002-001-A GAS LINE

LAM 839-460424-001-A CONNECTOR, FOR GAS LINE

LAM 839-470007-100-A GAS LINE

LAM 839-470479-002-A GAS LINE

LAM 839-470876-020 HOSE, METAL FLEX

LAM 839-480190-001-B GAS LINE

LAM 839-482179-001 DIFFUSER 0.2u NW50

LAM 839-482254-001 WLDMT,MANF,VLV,VCE

LAM 839-495013-001 LINER, CHAMBER, VAT65 TRNSN MANF

LAM 839-495013-001 LINER, CHAMBER, VAT65 TRNSN MANF

LAM 839-5010502-100 ESC PLASMA COAT

LAM 839-800728-003 WLDMNT,HE VALVES,LONG

LAM 839-L011520-001 CYLINDER, AIR

LAM 839-S075575-001-01 THERMO COUPLE

LAM 840-009865-080 KIT, VALVE, REPAIR, HPS, CHAM

LAM 841-005728-003 TEFLON SEAL

LAM 841-010299-446 ASSYCOURT WAFER TRANS

LAM 846-029194-001 KIT, EMO

LAM 846-029349-001 KIT RETROFIT NW25 RGAPORT

LAM 846-029901-002 KIT QD BOX ASSY LOW TEMP

LAM 849-020335-001 KIT, QRTLY, P.M. EXT L.L

LAM 849-020338-001 KIT ANN PM LOAD 4520

LAM 849-020354-001 KIT, QRTLY, P.M. ENT L.L

LAM 849-030994-002 KIT,CLEAN,PM,GATE VALVE,250MM

LAM 849-095858-001 KIT, PREVENTITIVE MAINT

LAM 849-210028-001 KIT, QRTLY, P.M., CHAMBER 4520

LAM 849-210029-001 KIT, QRTLY, P.M., CHAMBER 4420

LAM 849-210033-001 PM, KIT QTRLY

LAM 849-210034-001 KIT ANN PM TCU

LAM 849-510317-001 KIT,QTRLY,PVNT MAIN,9600PTX CE

LAM 851-8226-008 PCB, 4 AXIS COUNTER

LAM 852-11060-002 ASSY HOUSING UPPER REAC CHAM

LAM 852-11302-0 VALVE, PNUE, NC, 3/32 ORF, 1/8 FPT-TPM, MACE

LAM 852-210010-003 CHAMBER BODY

LAM 852-222296-600 ASSY, VME CD CG, STD, ENVSN AL

LAM 853-000358-001 CRT HOUSING

LAM 853-000577-001 ASM PHASE & MAG DETECTOR 490 N/C

LAM 853-000886-001 HARNESS GAS PANEL

LAM 853-001154-006 ASM EXIT ARM 3" 490

LAM 853-001154-008 AEM, EXIT, 6"

LAM 853-001198-004 GATE DELRIN INNER ASSM

LAM 853-001320-001 CABLE RECIPE MOD ASY

LAM 853-001412-002 CABLE BNC LONG

LAM 853-002371-001 FAN MATCHBOX

LAM 853-002499-002 ASSY,VOLTAGE DETECTOR,ESC,2300

LAM 853-002751-001 POWER, SUPPLY, 5V

LAM 853-002751-001 POWER, SUPPLY, 5V

LAM 853-003607-001 CA,ASSY,HARN,BP,INT

LAM 853-004070-001 HARNESS LIFTER

LAM 853-004093-001 ASSY MOTOR DRIVE BELT

LAM 853-004093-001 ASSY MOTOR DRIVE BELT

LAM 853-004197-001 VALVE, DELAY, BALLAST

LAM 853-004359-001 HARN,MARK 01

LAM 853-005949-002 ASSY, PLL END POINT DETECTOR

LAM 853-006037-001 ASSY CHAMBER BATTOM

LAM 853-006103-001 CABLE, ID ROM ADAPTER

LAM 853-006613-001 ASM EXIT UNLOAD LIFTER LAM 490

LAM 853-008389-002 LIFTER ANODE ASSY

LAM 853-008580-001 HARNESS ASSY MATCH CONTROL

LAM 853-00886-001 HARNESS ASSY GAS BOX

LAM 853-009535-002 ASSY, CHAMBER FRONT

LAM 853-009536-002 ASSY CHAMBER REAR

LAM 853-011053-002 ASSY,HEATED,MANO

LAM 853-011053-103 MANOMETER

LAM 853-011076-001 ASSY, GROUND, STRAP

LAM 853-011094-101 ASSY. MONOCHROMATOR,MODEL,EP200,MMD

LAM 853-011117-001 ASSY, GAP HEATING

LAM 853-011141-003 BRAKE,GAP,ASSY.

LAM 853-011168-500 ASSY GAP DRIVE PROTECTOR

LAM 853-011594-206 ASSY UPR ELECT 6"(46)

LAM 853-011632-001 4400, LOWER, ELC, ASSY

LAM 853-011833-001 BOX, RF, SWITCH, ASSY,HARNO/TEMP

LAM 853-012095-005 5"ASSY 5" EXIT ARM

LAM 853-012095-006 ASM EXIT ARM 6" WT

LAM 853-012095-006 ASM EXIT ARM 6" WT

LAM 853-012095-008 ARM, EXIT

LAM 853-012118-006 LOAD LOCK ARM

LAM 853-012118-008 ASSY WAFER HOLDER

LAM 853-012123-001 DRIVE HARMONIC ARM ASSY THOR CONN

LAM 853-012123-500 DRIVE HARMONIC ARM

LAM 853-012156-001 LIFTER 4'' OXE

LAM 853-012160-002 CAP

LAM 853-012176-006 ASSY WAFER HOLDER TIGHT POCKET, 6"

LAM 853-012200-002 ASSY, GATE DRIVE INNER

LAM 853-012350-002 ASSY, GATE, OUTER

LAM 853-012500-002 ASSY, EDGE, SENSOR

LAM 853-012500R-002 ASSY EDGE DETECTOR

LAM 853-012530-001 ASSY, VAC, BLK, FRU

LAM 853-012530-001 ASSY, VAC, BLK, FRU

LAM 853-012550-001 WAFER SHUTTLE ASM

LAM 853-012566-001 SHUTTLE ASSY SPATULA

LAM 853-012600-101 ASSY, INDEX SEND

LAM 853-013540-002 MANIFOLD,HEATED,4400

LAM 853-013541-002 ASSY, THROTTLE VALVE

LAM 853-013542-002 ASSY, ISO VALVE HTD

LAM 853-013542-002 ASSY, ISO VALVE HTD

LAM 853-013800-002 SHUTTLE ASSEMBLY

LAM 853-014229-001 ASSY JUMPER D-SUB PUMP CART INTERFACE

LAM 853-014650-001 ASSY RF GEN FLOW SWITCH

LAM 853-015030-001 CONTROLLER, MANUAL BOTTOM MAT

LAM 853-015060-001 SENSOR, TEMPERATURE, ASSY

LAM 853-015130-002 MATCH ASSY, LOWER

LAM 853-015130-003 RF MATCH GEAR DRIVEN

LAM 853-015130-103 ASSY MATCH RF

LAM 853-015130-503 ASSY, MATCH, RF,

LAM 853-015755-001 ASSY FLOW SWITCH

LAM 853-015757-001 H2O LEVEL SWITCH

LAM 853-015761-103 ASSY, SLIDE SWITCH

LAM 853-015767-001 ASSY FLOW SWITCH N2

LAM 853-015767-001 ASSY FLOW SWITCH N2

LAM 853-015775-002 ASSY,DI,FLSW,200SCCM

LAM 853-015820-001 ASSY,HARN,HEATER OVERTEMP CIRC

LAM 853-015852-002 CABLE, FLAT

LAM 853-015854-001 CABLE  MOTOR SIGNAL INTF

LAM 853-015982-001 CONTROLLER MANUAL TOP MATCH

LAM 853-015982-001 CONTROLLER MANUAL TOP MATCH

LAM 853-017152-003 PANEL

LAM 853-017163-001 BOX, RF, SWITCH

LAM 853-017163-001 BOX, RF, SWITCH

LAM 853-017163-101 ASSY, RF,SWITCHBOX,TWO,PLUG

LAM 853-017163-101 ASSY, RF,SWITCHBOX,TWO,PLUG

LAM 853-017163R001 RFRB ASSY RF SWITCH BOX

LAM 853-017340-001 ASM RESISTOR PACK

LAM 853-017340-202 ASSY RESISTOR HEAT SINK

LAM 853-017366-001 GAP IF CABLE

LAM 853-017370-001 ASSY GAP DRIVE P.S.

LAM 853-017370-007 ASSY, PWR, SPLY, GAP, DR

LAM 853-017400-001 ASSY, LOW FREQ. MATCH-TRANS.

LAM 853-017410-001 CABLE LOWER RF MATCH N/C

LAM 853-017411-002 HARN,ASSY,RF,GAP,CONTROL

LAM 853-017411-002 HARN,ASSY,RF,GAP,CONTROL

LAM 853-017415-001 CABLE;UPPER RF MATCH D-S

LAM 853-017415-001 CABLE;UPPER RF MATCH D-S

LAM 853-017417-001 CABLE, HARNESS

LAM 853-017423-005 CABLE ASSY COAX RFMATCH UPR 8FT

LAM 853-017435-001 PCB 4-PIN LIFTER FILTER

LAM 853-017435-001 PCB 4-PIN LIFTER FILTER

LAM 853-017478-001 ASSY, PRESSURE,SW10,PSIG

LAM 853-017478-001 ASSY, PRESSURE,SW10,PSIG

LAM 853-017480-002 ASSY,VACUUM SWITCH 100 TORR

LAM 853-017480-002 ASSY,VACUUM SWITCH 100 TORR

LAM 853-017505-001 POWERSUPPLY,ASSY,CRT

LAM 853-017515-001 ASSY  CBL  FLOPPY DC PWR INTFC

LAM 853-017620-001 TRI-CONVECTRON INTERFACE

LAM 853-017631-001 ASSY VAC. SWITCH 724

LAM 853-017631-002 SWITCH, 724 TORR, CHAMBER

LAM 853-017631-002 SWITCH, 724 TORR, CHAMBER

LAM 853-017633-003 ASSY, OPT.SENSOR

LAM 853-017633-005 ASSY,OPT,SENSOR

LAM 853-017633-009 ASSY SENSOR OPTICAL,HOME,GAP

LAM 853-017634-101 ASSY SOLENOID RELEASE

LAM 853-017636-002 SWITCH VACUUM W/ASSY

LAM 853-017637-001 ASSEMBLY MOTOR STEPPER

LAM 853-017643-001 MANOMETER, 0-10 TORR

LAM 853-017643-001 MANOMETER, 0-10 TORR

LAM 853-017643-011 ASSY,MANOMETER,OXE

LAM 853-017643R-001 MANOMETER 10TORR

LAM 853-017645-001 ELEVATOR

LAM 853-017649-001 LIFT ASSY

LAM 853-017653-001 MANOMETER, 4520 ASSEMBLY

LAM 853-017655-001 ASSY SOL. INNER DOOR RELEASE

LAM 853-017805-025 CABLE ASSY

LAM 853-017805-055 CABLE, RF,GEN,55FT.

LAM 853-017805-085 CABLE, WEB 627 RF95

LAM 853-017807-001 ASSY, CA, INTRCONN, COAX, LWR

LAM 853-017816-020 ASSY POWER CORD GENERATOR CA

LAM 853-017817-040 ASSY, CA, EMO AC CONT BOX 40 FT

LAM 853-017817-060 CABLE ASSY

LAM 853-017818-020 ASSY,CABLE

LAM 853-017818-020 ASSY,CABLE

LAM 853-017818-040 CABLE ASSY PUMP CART EMO

LAM 853-017824-060 CABLE,TCU EMO

LAM 853-017932-001 STEPPER MOTOR CABLE

LAM 853-017933-002 CABLE-ARM DRIVE STEPPER MOTOR

LAM 853-017936-002 ASSY CABLE RF MATCH

LAM 853-017936-003 CABLE-RIBBON

LAM 853-017941-001 ASSY CABLE ENT LL #1 SIGNAL

LAM 853-017941-001 ASSY CABLE ENT LL #1 SIGNAL

LAM 853-017946-004 INTERCONNECT CABLE

LAM 853-017947-001 CABLE ASSY

LAM 853-017953-050 ASSY, CBL PUMP IFACE

LAM 853-017955-001 CABLE CONNECTOR

LAM 853-017961-060 CABLE DET OPER INTF.

LAM 853-017962-050 CABLE TCU CHANNEL INTC 50 FT

LAM 853-01983-005 DUAL ENDPOINT DETECTOR

LAM 853-021039-001 ASSY HARN HTR CRTG 75W 4620

LAM 853-021256-001 LIFTER, 4", OXE

LAM 853-021260-001 WIRE ASSY W/ TUBE

LAM 853-021614-001 ASSY, CABLE, HEATER AC PWR

LAM 853-021628-001 ASSY, THERMOCOUPLE, J-TYPE

LAM 853-021648-001 ASSY VALVE THROTTLE HEATED VAC MANIFOLD ISO-E

LAM 853-021664-001 ASSY HEATER BELLOWS

LAM 853-022272-001 CA,AC,HEATER

LAM 853-023163-700 CA,SIG,GEN,FLOW,SW,EXTENTION

LAM 853-023537-001 CABLE,ASSY

LAM 853-023631-035 CABLE ASSY

LAM 853-025054-004 ASSY, HSG, ESC PWR SPLY

LAM 853-025944-001 RF, SENSE BOX, AUTOTUNE

LAM 853-025952-002 RF SENSE BOX

LAM 853-027429-001 ASSY LIMIT SWITCH LIFTER DOWN

LAM 853-028525-001 ASSY,TEMP,SENSOR,BOT,OXE

LAM 853-028695-002 HARNESS ASSY DSQ VALVE OPEN J6

LAM 853-029462-001 EXITLOAD, LOCK WAFER SEN

LAM 853-029462-002 WAFER SENSOR EXIT/LOADLOCK

LAM 853-029481-001 ASSY CABLE BAR CODE SCANNER

LAM 853-031498-001 HEATER-CARTRIDGE ASSY 100W

LAM 853-031499-001 CARTRIDGE-HEATER ASSY 150W

LAM 853-031685-001 MATCH ASSY , MAIN TCP

LAM 853-032018-005 UPR MATCH BOX ASSY

LAM 853-032040-028 CABLE ASSY

LAM 853-0322903-001 HEATED ELBOW

LAM 853-0324296-001 ASSY, CA, COAX, RF

LAM 853-034109-002 ASSY HARNESSS APADTER UPPER CHAMBER

LAM 853-034112-002 ASSY,CABLE,TC,JTYPE,THERMOCOUPLE,ANAFAZE

LAM 853-034112-003 TC, GAP HEATER,THERMOCOUPLE,ANAFAZE

LAM 853-034120-001 CABLE ASSY

LAM 853-034120-002 CABLE ASSY DSUB FLTRD F/G

LAM 853-034120-002 CABLE ASSY DSUB FLTRD F/G

LAM 853-034126-001 ASSY,CA,37 PIN,ADIO,TCP AUTOTN

LAM 853-034126-103 ASSY, CA, 37 PIN, ADIO, TCP AUTOTN

LAM 853-034160-001 CONTROLLER, VDS

LAM 853-034175-080 ASSY, CA, TCU EMO/RMT ENBL, 80FT

LAM 853-034175-080 ASSY, CA, TCU EMO/RMT ENBL, 80FT

LAM 853-034254-050 ASSY,CA,TCU INTFC

LAM 853-034254-060 ASSY,CA,TCU INTFC,60FT

LAM 853-034356-001 HARNESS ASSY AC GAP BARREL HTR

LAM 853-034428-001 ASSY,HARNESS,PRI HTD WDO

LAM 853-034431-001 ASSY,HARN,SEC HTD WDO,9600

LAM 853-034442-001 ASSY,CA,ADIO

LAM 853-034455-001 ASSY,CA,RS232 INTFC,VDS

LAM 853-034469-001 ASSY,CA,RBN,MFC EXT,WVDS

LAM 853-034471-002 ASSY, HARN, ADPTR, LFTR SNSR SIG

LAM 853-034472-001 ASSY HARNESS ADAPTOR LIFTER

LAM 853-034475-001 ASSY,HARN,PT VLV,WDS

LAM 853-034479-001 ASSY CABLE STPR MOT ARM DR ENTRLL

LAM 853-034542-080 ASSY CA PMP EMO 80FT

LAM 853-034702-001 ASSY, CABLE, TC PROBE J-TYPE

LAM 853-06908-004 ASSY,GND STRAP,BRD,4.38 (PACK OF 10)

LAM 853-072129-200 WAFER, AL-PLO SAPPHIRE 200MM

LAM 853-072156-001 ASSY, ESC, HIGH TEMP,200MM

LAM 853-080254-001 ASSY, WFR ARM, 200MM, ASIQ, 384T

LAM 853-090301-001 CABLE, AIRLOCK HARNESS ENTRANCE

LAM 853-090301-002 CABLE, AIRLOCK HARNESS EXIT

LAM 853-090532-001 SWITCH ROLLER WIRE HARNESS 490 N/C

LAM 853-092148-001 ASSY, MOTOR STEPPER

LAM 853-092664-001 ASSY, SENSOR WAFER A/EX1

LAM 853-110112-020 TCU POWER CABLE 3 PHASE ALR

LAM 853-110629-001 CABLE ASSY

LAM 853-11076-001 ASSY, GROUND, STRAP

LAM 853-140051-001 LIFTER ASSY

LAM 853-140051-002 LIFTER ASSY

LAM 853-140218-001 RF MATCH

LAM 853-140218-003 UPPER,MATCH

LAM 853-15183-001 RF MATCH ADAPTOR ASSEMBLY FOR LOWER

LAM 853-15982-1 AUTOTUNE BOX

LAM 853-160195-002 ASSY, WFR SNSR, MICROWAVE

LAM 853-170245-001 ASSY PLASMA ARSR HE BCKSDE

LAM 853-17480-001 SWITCH ,75TORR

LAM 853-17480-002 SWITCH, 75 TORR

LAM 853-17480-002 SWITCH, 75 TORR

LAM 853-17625-001 REPUBLIC CABLE

LAM 853-17643-001-C MANOMETER 10 TORR MODEL #CMLA-11S02

LAM 853-17649-1 REPUBLIC CABLE

LAM 853-180033-003 MANIFOLD CHAMBER ROUGHING WELDMENT HEATED

LAM 853-190074-001 HARNESS ASSY HE BKSIDE VALVE CONTROL

LAM 853-190140-001 CABLE ASSY STEPPER MOTOR ARM DRIVE

LAM 853-190203-010 ASSY,CA,PWR,WMNT,ENV

LAM 853-190260-002 CABLE ASSY, STPR MTR EXIT LL

LAM 853-190313-002 ASSY, HARN, HI-VOLT, ESC, OXD

LAM 853-190466-001 ASSY CAVMEBUSRPTR

LAM 853-190468-001 VIDEO EXTENSION CABLE

LAM 853-190478-001 SENSOR;WAFER SLIDE OUT

LAM 853-190478-002 SENSOR;WAFER SLIDE OUT

LAM 853-210414-002 ASSY,TOP PLATE FAN HSG 960

LAM 853-210414-002 ASSY,TOP PLATE FAN HSG 960

LAM 853-210621-306 COUPLING RING

LAM 853-220116-001 ASS'Y AUTO LOADER LI

LAM 853-220145-001 ARM END EFFECTOR AUTOLOAD ER

LAM 853-222317-001 INTERFACE RIBBON CABLE

LAM 853-250445-001 ASSEMBLY, PLASMA STARTER

LAM 853-250982-001 ASSEMBLY RELAY UPPER ELECTRODE GROUNDING

LAM 853-27429-001 LIFTER SENSOR

LAM 853-320014-002 ASSY,RAIL WFR XPRTSHTL

LAM 853-320030-002 ASSY OPT SNSR DARL W/LEADS